Furnace structure & Vacuum Chamber

· Two temperature controllers.

· The chamber is made of high purity fused quartz tube.

· Quartz tube size: 11" OD/10.8" ID x 9" H

· The vacuum flanges are made of Stainless Steel 316.

Vacuum Flanges

· Top Flange with one KFD-25 vacuum port and one gas outlet (1/4" pipe required) can slide up or down manually to load and unload substrate and evaporated material easily.

· Bottom flange has one KFD-25 vacuum port with one gas inlet (1/4" pipe required) with needle valves.

· The flange is sealed by double silicone o-rings and can achieve max. the vacuum pressure of 10E-2 Torr by a quality mechanical pump and 10E-5 Torr by a molecular pump (vacuum pump is not included, please order separately).

· One digital vacuum gauge is installed on the top flange.  

· Precision anti-corrosion digital vacuum gauge is in standard package (Since 2016.03.24).

Gas Flow Control

Gas mixer integrated with two float-meters with adjustable measurement ranges of 16 -160 mL/m 

Heater and Sample Holder

· Two independently controlled heaters with a manually adjustable gap from 2 - 30 mm. 

· 20 pcs Halogen lamps are used as the heating element for rapid thermal processing.

· Heaters are is made of stainless steel with water cold jacket to reduce heat radiation and allow for fast cooling.

· 5" Dia. the circular wafer holder is built into the top heater for holding the substrate.

· One set of high thermal-conductive AlN plates or graphite plate (5" Dia. x 0.5mm Thick) is included (place on the bottom for evaporating material )

· A 58L/min circulating water chiller is included for saving water source ( click the picture below to see detailed specs).

Temperature Controller

· Two precision digital temperature controllers with 30 segments programmable offer independent control of the top and bottom heaters.

· Each controller has PID autotune function to protect heaters from overshooting and an alarm function to avoid overheating and a thermal couple are broken.

· PC communication interface & software is installed for recording temperature profile shown as below.

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Working Temperature

· Maximum temperature for each heater: <= 800ºC.

· Maximum temperature difference between two heaters: <= 300ºC depends on the spacing between two heaters:

o Spacing 30mm       Max. temp difference:  315ºC @ heating bottom only

Heating & Cooling Rate

· Heating: < 8ºC/s ( heating single heater only )

· Cooling: < 10ºC/s (600 - 100ºC) Max.

Thermal Couple

Two K-type thermal couples are installed on top and bottom heaters separately.

Working Voltage

220VAC, Single Phase, 60A Air Breaker required

Power Requirement

9.5KW total 

Dimensions

1085mm L x 680mm W x 1710mm H

Shipping Weight & Dimension

· Two pallets: 525 lbs   and 48" x 40" x 87" and 165 lbs with 39x31x29" dimension

Optional

· One vacuum pump is required. Please order separately by clicking the first picture from the left below. Vacuum level can reach < = 10E-2 torr by mechanical pump. 

· If you run corrosive gas, please consider to use the anti-corrosive dry pump is shown in the second picture from the left below ( Pfeiffer pump from Germany ) at extra cost.

· You may choose digital MFC gas delivery system by clicking the first picture from the right below.

Warranty

One year limited with lifetime support ( Consumable parts such as quartz tube and heating lamps are not covered by the warranty).

Laptop, software & WiFi Control (Optional)

· Brand new laptop with Microsoft Window 10 and Microsoft Office 2013 (30 days free trial) for immediate use.

· Labview Based Temperature Control System (EQ-MTS01) enables user to edit temperature profile, manage heat-treatment recipe, record and plot data for MTI furnaces.

· A wireless remote control provides up to 300 meters operating range.

· Above features are available upon request at an extra cost (up to $1,000). Please contact us for more information.

· Note:  The software is only compatible with Tmax’s Yudian Temperature Controller

Application Notes & Warnings

     

· The tube furnaces with quartz tube are designed for use under vacuum and low pressure < 0.2 bars / 3 psi / 0.02 Mpa. Vacuum pressures may only be safely used up to 1000°C. The flow rate for gasses should be limited to < 200 SCCM (or 200 ml/min) for reducing thermal shocks to the tube.

· Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. 

· The foot-stand of this furnace is designed for short distance hauling on the even surface