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CVD Tube Furnace

1200°C Dual Zones CVD Tube Furnace with Mass Flow Control System & Vacuum System

  • Model Number:

    TMAX-1200double CVD

  • Compliance:

    CE Certified

  • Warranty:

    Two years limited warranty with lifetime technical support

  • Shipping Port:

    Xiamen

  • Payment:

    L/C D/A D/P T/T Western Union

  • Delivery Time:

    5 days
Product Details


1200°C Dual Zones CVD Tube Furnace with Mass Flow Control System & Vacuum System


This is a video link to our product.

https://www.youtube.com/watch?v=FzLjvMXq1pY&t=37s


 It is competent for the experiments as CVD, Diffusion and other thermo-treatments under vacuum status and shielding gas protection.The furnace comes with a 2-channel digital LED display mas flow gas control station.


1. Tube furnace

Detailed technical parameters

Model

TL1200-1200-I

TL1200-1200-II

TL1200-1200-III

TL1200-1200-IV

Power

3.6KW

3.6KW

3.6KW

5.2KW

Tube size（OD）(mm)

Dia60（OD）X1000mm

Dia80（OD）X1000mm

Dia100（OD）X1000mm

Dia150（OD）X1000mm

Dimensions

1140X460X695

1140X460X695

1140X460X695

1110X530X647

Supply voltage

220V

Phase

single phase

Heating element

Resistance wire imported from Sweden Kanthal A1 (resistance wire guaranteed for 2 years)

 

 

 

 

Temperature control

UAV program temperature control instrument (standard)

 

1, 30-stage program temperature control intelligent PID adjustment.

 

2.Withover-temperatureprotection,theelectricfurnaceheatingcircuitisautomaticallycutoffwhenthetemperatureis over-temperature or broken, (when the electric furnace temperature exceeds 1200 degrees or the thermocouple is blown, the AC relay on the main circuit will be automatically disconnected, the main circuit is broken. On, the ON light on the panel is off, the OFF light is on, and the limited protection electricfurnace).

3, with 485 communication interface (standard when purchasing software)

 

4, with power-off protection function, that is, when the power is turned on after the power is turned off, the program does not start from the starting temperature, but the furnace temperature rises from the time of power failure.

 

5, the meter has the function of temperature self-tuning

 

 

Furnace material

1.  High-quality high-purity alumina polycrystalline fiber curing furnace formed by vacuum suctionfiltration.

 

2.  Formed by Japanesetechnology.

 

3.  The spacing and pitch of the resistance wires in the furnace are all arranged according to the best thermal technology in Japan, and the temperature field is simulated by the thermalsoftware.

Valve and flange

 

 

 

 

 60/80/100 top view

Control accuracy

+/- 1 ℃

Trigger

Phase-shifted trigger

Electric appliance

Zhejiang chint

Silicon controlled

106/16E Simenkang, Germany

The highest temperature in the first and second

temperature zones

 

 

1200 ℃

Rated temperature in the first andsecond

temperaturezones

 

1100 ℃

Length of heating section in the first

temperaturezone

 

205mm

Length of heating section in the second

temperature zone

 

205mm

Length of constant

temperature section in the first temperature

 

80mm

zone

 

Length of constant temperature section in the second

temperature zone

 

 

80mm

Heating rate

≤30 ℃/ Min (it can be modified as required)

Temperature field curve

 

       

Recommended rate of

temperature rise

≤15   ℃/ Min

Thermocouple Type

K Type

Constant temperature

length

150mm

Peripheral surface

temperature

≤45℃

Open cover protection

system

When the furnace cover is opened, the relay will automatically cut off the main power supply, effectively ensuring the

safety of the user

2. Gas supply system

Introduction to gas supply system:

  (1) Components of the (mixed) gas system:


a)       Float flow meter or proton flow meter

b)       Pressure gauge

c)       Cut-off valve

d)       Interface board

e)       Valve connector

f)        Cylinder connector

g)       Teflon tube (connecting pipe for gas supply or mixed system station and gas cylinder connection pipe )

h)       Mixed gas tank

i)         Stainless steel pipe (connecting pipe for gas supply or mixed control system station)

j)         Cover


 Main technical data

No

Item

D08-2E

1

Output Power

+15V±5% 300mA

-15V±5% 600mA

2

Reference Source

+5.00V±0.1% 5mA

3

Power Supply

~220V/~110±10% 50/60Hz

4

Maximum Power

25W

5

Input and Output Signal

0~+5V

6

Dimension

Standard Dimension  ：（440X100X220）mm

Maximum Dimension ：（440X114X278）mm

7

Weight

4.2Kg

8

Control Channel Figure and Display Feature

2 Channel of MFC/MFM and 2 Display Monitor

 

3. Vacuum System

The system (can pump the vacuum in the tube furnace to 0.6Pa) consists of a suction flange (self-made) with KF25 interface, high vacuum baffle method, resistance vacuum gauge, bellows, bracket (homemade), vacuum pump Connect the tee pipe at the flange outlet, connect the resistance silicon to one end of the three-way pipe, connect the high vacuum flapper valve to the other end, connect the flapper valve and the vacuum pump with the corrugation of Dia25, and use the KF25 quick clamp for the connection port. 

    Technical Parameters:

* Distribution regulation: ZJ-52T resistance gauge

* Measuring range: 10 5 ～10 -1 Pa

* Number of measurements: 1 way

* Number of control channels: 2 roads can be extended to 4 or 8 roads

* Control range: 5 × 10 3 ~ 5 × 10 -1 Pa

* Control mode: relay contact output, load capacity AC220V/3A (or DC28V/3A) non-inductive load

* Power: 90-260V/50Hz or 220V ± 10% 50Hz

* Power consumption: 25W

* Weight: 4Kg/3Kg/0.5Kg (depending on the chassis)

* Chassis size: 240 × 88 × 280 or 265 × 119 × 280 or 96 × 96 × 120

480 × 88 × 280 or 480 × 119 × 280 (width × height × depth)

    Performance characteristics:

*LED green screen digital display.

* Wide range of star surveys

* Fast response speed

* Microcomputer correction regulates nonlinearity and reduces measurement errors.

* Optical isolation, digital filtering, enhanced anti-interference ability.

* PVC color panel, beautiful appearance.

* Point control or area relay control output, while the set point has power-down protection memory function.  

 

 Adopt FX-16 vacuum pump



Standard Package

 Part description

   Quantity   

Part image 

TMAX-2-1200-C split tube furnace

 1 set

 

 Multi-channel gas supply system

1 set

 

 Vacuum pump and enclosure (optional)

 1 set

 

 Quartz tube 

1 pc

 

 Analog flow meter

1 pc

 

 Stainless steel vacuum sealing flanges w/ pressure meter  

 1 set

 

 Stainless steel hook

 1 pc

 

 Alumina ceramic thermal block

 2 pairs

 

 Thermal gloves

 1 pair

 

 High temperature Al2O3 alumina crucible 

 5 pcs

 

 Spare fuse

2 pcs

 

 USB/RS485 computer interface kit

 1 set

 

 

Related Tags :

CVD Tube Furnace 1200 CVD Furnace Dual Zones CVD Furnace
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