PE/CVD Furnace

1200°C PE/CVD Furnace w/ RF Generator, Gas Mix & Pumping System

  • Model Number:

  • Compliance:

    CE Certified
  • Warranty:

    Two years limited warranty with lifetime technical support
  • Payment:

    L/C D/A D/P T/T Western Union
  • Delivery Time:

    15 day
  • contact now
Product Details

1200°C PE/CVD Furnace w/ RF Generator, Gas Mix & Pumping System

TMAX-1200PECVD Chemical Vapor Deposition (CVD) and Plasma-Enhanced Chemical Vapor Deposition (PECVD) multi-zone split tube furnaces feature the famous Kanthal® (Sweden) wire heating elements embedded in high quality Mitsubishi® (Japan) alumina fiber insulation. All steel dual-layer housing ensures durability and helps minimize heat loss to exterior surface.

Furnace operation is controlled by Shimaden® (Japan) 40-segment digital controller with built-in RS485 digital communications port and USB adaptor, allowing the user to connect to a PC for remote control and monitoring of the furnace. You can also save or export test results.

All our furnaces are CE compliant.



1        Compact, portable and lightweight design.

2        Lower processing temperatures required compare to conventional CVDs.

3        Film stress can be controlled by high/low frequency mixing techniques.

4        Split furnace chamber for fast and easy tube access.

5        Standard package includes set of stainless steel vacuum sealing flanges with valves and pressure meter.

6        Microprocessor based self-tuning PID control provides optimum thermal process with minimal overshoot.

7        Multiple atmosphere processes in a single cycle are possible (ex: binder burn out in air and parts sintering under rough vacuum or inert gas environment.)

8        Built-in amp meter and dual voltmeters for easy monitoring and troubleshooting.

9        Built-in computer interface.

10        Long life type K thermocouple.

11        Slidable furnace option gives you ultra fast cooling rates


1        Overheat protection shuts down the furnace if temperature is outside of acceptable range (refer to controller's manual) or when the thermocouple is broken or malfunctions.

2        Power failure protection resumes furnace operation right after the point of failure when power is reestablished.

Warning! NEVER fill furnace with explosive gases, including Hydrogen, Carbon Monoxide and Methane.

PE/CVD Furnace

PE/CVD Furnace

PE/CVD Furnace

PE/CVD Furnace

Furnace, vacuum pump and gas mixing system specifications

 Tube material


 Heating element

 Kanthal® (Sweden) resistance coil wire

 Max. vs constant working temperatures

 1200°C max. and 1100°C constant

 Thermo couple type


 Refractory lining

 Mitsubishi® (Japan) 1500 grade fiber alumina

 Temperature controller

 Shimaden® (Japan) fp93 with 4 programs and 40 segments
 (ie. 4 x 10 segments or 2 x 20 segments)

 Maximum heating & cooling rate  

 < 30°C / min

 Temperature controller precision

 +/- 1°C (+/- 1.8°F)

 Vacuum sealing flange kit

 Stainless steel vacuum sealing flanges with one vacuum gauge,
two valves and four thermal ceramic blocks.      

 Electrical requirements

 208-240VAC, 50/60 Hz, single phase

 RF generator specifications

 Electrical requirements

 208-240 volts 50/60 Hz

 Output power

 5 to 500 watts, adjustable in +/-1% step

 RF frequency

 13 MHz with +/-0.005% stability

 Reflection power

 200 watts max.



 RF output port

 50 Ω, N-type, female




Standard Package


Part description    






Part image 


 split tube furnace

 1 set

 Multi-channel gas supply system

1 set

 Plasma RF power supply (optional)

1 set

 Vacuum pump and enclosure (optional)

 1 set


 Quartz tube 

1 pc

 Analog flow meter

1 pc

 Stainless steel vacuum sealing flanges w/ pressure meter  

 1 set

 Stainless steel hook

 1 pc

 Alumina ceramic thermal block

 2 pairs

 Thermal gloves

 1 pair

 Spare fuse

2 pcs

 USB/RS485 computer interface kit

 1 set



1.  We supply machines with battery technology support.

2.  We supply full set of lithium battery equipment for lab research, pilot scale research and production line.

laboratory muffle furnace

1 Standard exported package: Internal anticollision protection, external export wooden box packaging.

2 Shipping by express, by air, by sea according to customers' requirements to find the most suitable way.

3 Responsible for the damage during the shipping process, will change the damage part for you for free.


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    We will give you a quotation within 24 hours. give you a quotation within 24 hours.

      1200°C PE/CVD Furnace w/ RF Generator, Gas Mix & Pumping System

    Contact Us:

    Xiamen Tmax Battery Equipments Limited.

    Add:No. 39, Xinchang Road, Xinyang, Haicang Dist., Xiamen, Fujian, China (Mainland)

    Email:[email protected]
    Email:[email protected]
    Skype:[email protected]