Structure & Features

• 280 mm O.D. x 260 mm I.D. x 310 mm Height quartz chamber for easy cleaning and sample loading
• 2" Dia rotatable evaporating sources for the uniform film coating
• Tungsten coil heater and alumina crucible for high-temperature coating up to 1700 ºC
• Precision temperature control with 30 programmable segments and +/- 1 ºC accuracy
• High vacuum can be achieved up to 1.0E-5 Torr via optional turbopump
• Gas flow port and valve are built in for chamber purge and CVD possibility

Input Power

• Input voltage:  AC 208 - 240 V 50/60 Hz, single phase  ( 110V AC is available via 1500W transformer )
• Input Power: 1,200 W
• output power:: 12 V, and 30 A max current. Recommended working current <30 A
• Power cable included without plug
  
  

Temperature Control & Heaters

• Tungsten coil heater with a thermocouple is built in at the bottom of alumina crucible (for temperature control (PIC. 1). Please refer to the left picture for dimensions
• Standard S type thermocouple (included and installed) - heating from 200 ºC - 1500 ºC (PIC. 2)
• Optional B-type thermocouple (at extra cost) - heating from 1200 ºC - 1700 ºC
• One digital temperature controller with 30 programmable segments and +/- 1 ºC accuracy (PIC. 3)
• The time settings of temperature controller are in seconds. Recommend to limit the temperature heating / cooling rate to 0.3 ºC/s (or 20 ºC/min) below 1200 ºC, and limit to 0.15 ºC/s (or 10 ºC/min) from 1200 - 1700 ºC
• For continuous heating above 1300 ºC, please limit the operation time to less than 1 hour to preserve the service life of bottom flange O-ring
• For fast coating up to 2000 °C, such as needed in Carbon coating, the user can remove thermocouple, alumina thermal block, and alumina crucible, load evaporation material directly into the tungsten coil heater, and use current manual control mode (PIC. 4)

• Four alumina crucibles (up to 1700 ºC) and two tungsten coil heaters are included. Please refer to the Optional section for ordering spare parts
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Rotatable Sample Holder

• One 50 mm Dia. rotatable sample stage and its shutter are installed on top flange.
• Rotating speed: 5 rpm
• The distance from sample holder to evaporation source is adjustable from 40 mm to 85 mm

Film Thickness Analysis System (optional)

Vacuum

• KF25 vacuum port is installed to connect to a vacuum pump
• The highest vacuum may reach <1E-5 Torr by pumping overnight with optional Turbomolecular pump
• A vacuum pump is required for coating. Please choose from the following Product Options
• Double Stage Rotary Vane Vacuum Pump with vapor trap to eliminate the oil mist, which can reach vacuum up to 1.0E-2 Torr for evaporating noble metallic materials, such as gold, silver, and organic materials. 
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Gas Inlet

• 1/4 tube fitting is built in for chamber purge or forming gas processing
• One needle valve is built-in to control gas flowing rate

Optional

• Extra alumina crucible and tungsten coil heater can be ordered at TMAX at extra cost

Overall dimension

Quartz Chamber Dimension

O.D.:280mm  ( 11")
I.D.: 260mm  (  10.2")
Length: 310mm  ( 12.2")

Compliance

• CE Certificate

Warranty

• One year limited warranty with lifetime support

Net Weight

• 80 kg 

Shipping Weight & Dimensions

• 200 lbs, 40" x 30" x 32"

Application Notes

• To achieve the high vacuum required for the evaporation of some materials, user can
• Check the chamber, O-ring, and flange for any particle, fiber, or scratch. Use lint-free tissue wetted with isopropyl alcohol (IPA) to wipe clean the surface
• Use heater tape to bake the chamber at 150 ºC and pre-heat the coil heater and crucible at 500 ºC while pumping with the optional turbopump for at least 2 hours
• Pump the chamber overnight without heating if a vacuum higher than 1.0E-5 Torr is needed
• DO NOT start the heating program or manually ramp up the current without an enclosed chamber and a vacuum!
• DO NOT release the vacuum or stop pumping when the coater is in evaporation operation! During the heater cool down, stop pumping or release the vacuum ONLY when the temperature is decreased below 100 ºC!