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CVD Furnace

Lab Quartz Tube 1200C CVD Furnace with Length 440mm Heating Zone

  • Model Number:

    TMAX-CVD1200
  • Compliance:

    CE Certified
  • Warranty:

    Two years limited warranty with lifetime technical support
  • Payment:

    L/C D/A D/P T/T Western Union
  • Delivery Time:

    5 days
Product Details


Lab Quartz Tube 1200C CVD Furnace with Length 440mm Heating Zone







The equipment introduction: The series of XY vacuum tube furnace use high pure alumina or quart tube as furnace chamber.  Precise and advanced auto temperature controller, high temperature accuracy,easy operation,excellent heat-insulation effect, symmetrical temperature uniform, XY tube furnace are widely used in the labs of university and Research Institutions, also used in factory for production.

 

 Technical Parameters

 

 

 

 

 

 

 

Max.temperature

1200C

Working temperature

≤1100C

Tube material

Quartz tube

Tube size

Diameter150mm,heating zone length440mm

Voltage

220V/50HZ

Heating element

Resistance wire

Thermocouple

K type

Temperature accuracy

±1℃

Heating rate

≤10℃/min

Temperature control

PID control and self-tuning adjustment,intelligent 30-segment programmable control, with over-temperature and break-off alarm function

Inlet gas/Atmosphere

It can be filled with various protective or destructive gases,Inert gases, mixed gases, nitrogen, oxygen, etc

Gas control

The air inlet can be set up 1 or more air intakes, each air inlet is provided with a needle valve, connected with a vacuum gauge. The air outlet is connected with one air outlet, and all holes are equipped with needle valves. Equipped with a vacuum pump.

Appearance design

The electric furnace adopts humanized design, beautiful and easy to operate, and the outer layer of paint is sprayed with high temperature baking technology. High temperature resistance, oxidation resistance, acid and alkali resistance. Color selection is aging resistant tone, will not cause the appearance color fade due to a long time of use.

Furnace Chamber material   

Adopt the most advanced light alumina ceramic fiber in the world, with excellent thermal insulation effect, light weight, high temperature resistance, cold and heat resistance, no crack, no crystallization, no slag, do not worry about pollution of the fired products. The energy saving effect is 60-80% of the old electric furnace.

Furnace shell  structure

Electric furnace shell adopts double layer forced air cooling structure, so that the electric furnace works at the highest temperature and the external temperature of the shell is close to room temperature, so as to avoid accidental injury.

Sealing way

Adopt 304 stainless steel flange, with easy loading and unloading, oxidation resistance, acid and alkali resistance, double seal, ensure the sealing  





 

Five channels gas mixed system

1. Three Mass Flow Controlled (MFC) Gas Mixing Station

2. Internally equipped with high-precision digital display mass flow meter for accurate control of gas flow,and have solenoid valve and commumication

 

3. Gas flow range is 0-500SCCm with an error of 0.02%

 

4.Outlet vacuum pressure gauge, built-in gas mixing system,

 

5. Stainless steel needle valve meter, standard double ferrule joint

 

PLC system

Siemens PLC uses touch screen control, PLC S7-200 flow digital display

 

 

 


Vacuum system

Vacuum pump: Diffusion pump unit

Max.vacuum degree:10-4mbar

KF25 quick connect, vacuum bellows, manual flapper valve and stainless steel flange, vacuum gauge

Warranty

One-year warranty period, lifetime maintenance, (excluding related consumables, such as furnace tubes, seals,heating element etc.)

Certificates: SGS,ISO&UL

 

 

Standard Package Accessories:

Electric Furnace

1 set


 


High temperature gloves

1 pair


 


Stainless steel flange

1 set

 

Crucible hook

1 pc

Tube stopper

2pcs


 


User manual

1 book


 


Gas mixed system

1 set


 


Vacuum system

1 set


 


 

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