Dual-source Evaporation Coating Instrument with Vacuum System

Main technical parameters:

1. Vacuum chamber: ∅ 280mm * H420mm;

2. Maximum workpiece size that can be plated: 100*100mm, backward compatible, samples can rotate;

3. Maximum vacuum degree: better than 8*10^(-5) Pa (molecular pump system);

4. Pumping time: from atmospheric pressure to 8*10^(-4) Pa less than 40 minutes;

5. Evaporation: Resistance-type evaporation electrode (2 pairs) power: 2KW; equipped with 1 set of digital evaporation power supply, which can switch between two sets of evaporation sources for use;

6. Opening method: front-opening structure, convenient for changing the wire and loading materials;

7. Vacuum system: 4L mechanical pump + 300L molecular pump system;

8. Control system: using touch screen control.