Dual-source Evaporation Coating Instrument with Vacuum System

Dual-source Evaporation Coating Instrument with Vacuum System Main technical parameters: 1. Vacuum chamber: ∅ 280mm * H420mm; 2. Maximum workpiece size that can be plated: 100*100mm, backward compatible, samples can rotate; 3. Maximum vacuum degree: better than 8*10^(-5) Pa (molecular pump system); 4. Pumping time: from atmospheric pressure to 8*10^(-4) Pa less than 40 minutes; 5. Evaporation: Resistance-type evaporation electrode (2 pairs) power: 2KW; equipped with 1 set of digital evaporation power supply, which can switch between two sets of evaporation sources for use; 6. Opening method: front-opening structure, convenient for changing the wire and loading materials; 7. Vacuum system: 4L mechanical pump + 300L molecular pump system; 8. Control system: using touch screen control.