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  • Email : [email protected]
  • Add : No. 39, Xinchang Road, Xinyang, Haicang Dist., Xiamen, Fujian, China (Mainland)
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Slliding Furnace

Dual Tube (100/80 mm) - CVD Sliding Furnace and 4 Channel Gas & Vacuum System

  • Model Number:

    TMAX-1200X-4-C4-SL-U
  • Dimension(L*W*H):

    Size can be customized
  • Compliance:

    CE Certified
  • Warranty:

    Two years limited warranty with lifetime technical support
  • Payment:

    L/C D/A D/P T/T Western Union
  • Delivery Time:

    15 day
  • contact now
Product Details

Dual Tube (100/80 mm) - CVD Sliding Furnace and 4 Channel Gas & Vacuum System


TMAX-1200X-4-C4-SL-UL  is a special dual tube CVD system designed for coating thin film on the metal foil, especially for preparing flexible electrode on metallic foil on new generation energy research. Fast heating and cooling can be achieved by sliding the furnace. Please refer to the Operations Instructions section to see the operations of the furnace:

  • A dual quartz tube:100mm Dia. exterior tube and suspended by 80 mm Dia. interior tube. Metallic foil (Graphene Growth Substrate) will be wrapped around inside tube surface for CVD reaction. 
  • Vacuum sealed flanges for the dual tube, which allow reactive gasses to flow between two tubes ( 10mm space ) and inert gas flow inside the tube for cooling.
  • 4 gas channels controlled by 4 separate digital MFCs
  • Vacuum pump is included with KF25 adapter and pipe for plug and play
  • Sliding rail is installed on the bottom of single zone furnace, which allows for fast heating or cooling by sliding furnace from one side to the other side.
  • One slide stopping clamp is included for holding the position of the furnace.

Both heating zone and vacuum system are selectable: Single or dual heating zone; High-Speed Oilless Dry Vacuum Pump - VBS-M1 or Two Stage Mechanical Pump - VBS-ACP15.

SPECIFICATIONS:

Furnace Structure

Single heating zone

  • High purity Al2O3 insulation chamber guarantees excellent temperature uniformity.
  • Cooling fans are installed at the bottom of the furnace to ensure efficient ventilation.
  • Sliding flange assembly is made of stainless steel.
  • Dual quartz tube:100mm Dia. exterior tube and suspended by 80 mm Dia. interior tube. Metallic foil (Graphene Growth Substrate) will be wrapped around inside tube surface for CVD reaction
  • Heating zone length: 440mm
    Constant temperature heating zone length: 120 (±1°C) @400~1100°C

Dual heating zone

  • High purity Al2O3 insulation chamber ensures excellent temperature uniformity.
  • Cooling fans are installed at the bottom of the furnace to ensure efficient ventilation.
  • Max. Temperature: 1200°C and continuous temperature: 1100°C.
  • Two Heating Zones controlled separately:

Dual direction sliding rails to ensure furnace moves smoothly.

  • 200mm length for each heating zone, 400mm total heating length
  • 250mm constant temperature zone if the two zones heating at same temperature
  • 500oC max temperature difference if place a thermal block in between two zone

Power

Single heating zone
Power: 208-240VAC,  50/60Hz, single phase,  2.5KW ( 20A Breaker required)

Dual heating zone
Power:  208-240VAC,  50/60Hz, single phase,  4 KW ( 50A Breaker required) 
10 feet power cable with no plug (ask a licensed electrician to do the plug)

Heating Temperature

  • Max. Temperature: 1100°C
  • Continuous Temperature: 1000°C

Heating & Cooling Rate

Max. heating and cooling rates depend on working temperature.  Please click on tables below to see the Max. heating & cooling rate varies at different temperature range.
( You shall calibrate temperature and heating cooling rate at your working condition before use )
          
  Heating plot            Cooling plot

                                            

Fused Quartz Tubes

  • High purity quartz tube:

Two pairs of vacuum sealed flanges with water cooling jackets and stainless steel needle valves

  • Outside tube EQ-QZTube-101D-1400: OD:4"x ID: 3.8" X 55" Length (OD 100 x ID 96 x 1400 mm )
  • Inside tube EQ-QZTube-80D-1800: OD:3.15: x ID x 2.95" x 70.8" Length (OD 80 x ID 75 x 1800 mm 


Vacuum Flanges

Using dual tube for inducing CVD growth on metal foil (wrapped around interior tube surface):

 

  • 1-1. Shown below, one pair of SS304 flanges to seal both the outside tube and the space  between the outside tube and inside the tube (this space is considered as a reaction chamber).
    • Left side flange: Barb fitting with needle valve as gas inlet, a digital vacuum gauge with measuring range 10^-4 to 1000 torr, water cooling inlet/outlet included
    • Right side flange: Right angle valve with KF25 flange fitting, a vacuum release needle valve, water cooling inlet/outlet included

  • 1-2. Leave both ends of inside tube open for gas cooling.
  •    

Ultimate vacuum pressure:   10^-2 torr (by mechanical pump)
                                          10^-5 torr (by turbo molecular pump)


Temperature Controller

  • PID automatic control with 30 programmable segments for precise control of heating rate, cooling rate and dwell time.
  • Built-in over temperature alarm and protection allows for operation without any attendant.
  • Over temperature protection and alarm allows for operation without attendant(s).
  • +/- 1 ºC temperature accuracy.
  • RS485 Communications Port.
    • Advanced Temperature Control (Optional)
    • MTS02-Y Temperature control software kit (for YD518P series controllers) + 15" laptop package is available at the options bar.  You may upgrade the temperature controller to the Eurotherm 3504 Temperature Controller which is fully compatible with LabVIEW. This package includes a Eurotherm 3504 programmer, a communication cable (RS485 - USB) and a software CD. Click the pic below to view the full spec of Eurotherm 3504 temperature controller. 
  •                


Mass Flow Meters & Gas Mixing Station

  • 4 precision mass flow controller ( MFC)  with digital display and adjusting knob are installed on the left bottom case to control gas flow rate:
  • 4 Gas channels (contact MTI sales if need more)
    • MFC 1: Control range from 0~100 SCCM
    • MFC 2: Control range from 0~200 SCCM
    • MFC 3: Control range from 0~200 SCCM
    • MFC 4: Control range from 0~500 SCCM
  • Flowing rate accuracy: ±1% FS
  • Gas inlet and outlet: 1/4" Swagelok tube connector
  • One 80mL gas mixing tank is installed in bottom case
  • Each gas channel has a stainless steel needle valve for easy on/off  
  • The flow rate is adjustable from the MFC panel

Vacuum Pump Station and valves

Optional 1:

  • Pfeiffer's High Speed (226L/min) Oilless Dry Vacuum Pump, 10E-3 Torr Limit is installed inside a heavy duty mobile cart. Please click the picture below for more details.
  • KFD25 adapter and stainless steel pipe are connected between pump and tube flange with a precision ball valve.
  • 10E-2 Torr vacuum can be achieved inside processing tube
  • Digital vacuum gauge (made in the USA) is installed on the left side flange. 
  • (Optional) For higher vacuum level to 10^-5 torr, please order below mobile turbo pump.

              

Optional 2:

  • The heavy duty Double Step Rotary Vane Vacuum Pump with Exhaust Filter & KF-D25 Inlet is installed inside a heavy duty mobile cart. Please click the picture below for more details.
  • 6.7x10-4 mbar vacuum can be achieved inside processing tube
  • Digital vacuum gauge (made in the USA) is installed on the left side flange. Please click the second picture below for more details
  • For higher vacuum level to 10^-5 torr, please order below mobile turbopump at extra cost:

              

Water Cooling Function

Water cooling on the flange is mainly for cooling down the o-ring inside the flange to ensure the best-sealed chamber at high temperature:

  • Water cooling flanges require >= 10L/M water flow.
  • You may use tap water as the coolant, but we strongly suggest you to use a recirculating water chiller for environmental considerations. Please click thumb below to order the water chiller at extra cost.

         

Optional Parts (building up a single tube furnace)

You can build up an 80mm Dia. single tube reaction chamber by ordering extra sealing flanges and install them onto interior tube:

  • Left side flange: Barb fitting with needle valve as gas inlet and 1/4'' feedthrough fitting for customer to insert a measuring sensor
  • Right side flange: KF25 fitting with mechanical gauge and vacuum release valve

              

Dimension

  • Furnace: 550 x 380 x 520mm
  • Bottom mobile case x 2: 600 x 600 x 600mm (one for gas mixing station and the other for vacuum pump)

Shipping 

  • Shipping Weight: ~800 lb
  • Shipping by freight with three pallets
  • Crating fee will be applied

Warranty

One year limited manufacturer's warranty (Consumable parts such as processing tubes, O-rings, and heating elements are not covered by the warranty, please order replacements at related products below). 

Laptop, software & WiFi Control (Optional)

  • Brand new laptop with Microsoft Window 10 and Microsoft Office 2013 (30 days free trial) for immediate use.
  • Labview Based Temperature Control System enables user to edit temperature profile, manage heat-treatment recipe, record and plot data for MTI furnaces.
  • A wireless remote control provides up to 300 meters operating range.
  • Above features are available upon request at an extra cost (up to $1,000). Please contact us for more information.

·         Note: 
The software is only compatible with MTI’s Yudian Temperature Controller

     

Compliance

  • CE Certified
  • All electric components ( >24V) are UL / MET / CSA certified
  • The furnace is ready to pass TUV(UL61010) or CSA certification at extra cost.               
     

Application Notes

 

  • Tube furnaces with quartz tubes are designed for using under vacuum and low pressure < 0.2 bars / 3 psi / 0.02 Mpa
  • Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation.
  • The flow rate for gasses should be limited to < 200 SCCM (or 200 ml/min) for reducing thermal shocks to the tube
  • Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°C
  • Click here to learn How to set up quartz/ ceramic tube and vacuum flange for MTI Tube furnace.
  • One slide stopping clamp is included for holding the position of the furnace.

  • After CVD, the graphene must be transferred from the metal catalyst to another substrate for most applications. By using the graphene transfer tape, the residue can be low.

Warning

  • Fast sample cooling can be achieved by sliding the heating chamber away. Please wear protective gears such as heat resistant suit & gloves if you intend to do so. 
  • DO NOT TOUCH THE TUBE SURFACE WHEN IT IS HOT!

 CVD Sliding Furnace

 

 


1.  We supply machines with battery technology support.

2.  We supply full set of lithium battery equipment for lab research, pilot scale research and production line.


 Vacuum Tube Furnace


1 Standard exported package: Internal anticollision protection, external export wooden box packaging.

2 Shipping by express, by air, by sea according to customers' requirements to find the most suitable way.

3 Responsible for the damage during the shipping process, will change the damage part for you for free.