Furnace Structure

Single heating zone

• High purity Al2O3 insulation chamber guarantees excellent temperature uniformity.
• Cooling fans are installed at the bottom of the furnace to ensure efficient ventilation.
• Sliding flange assembly is made of stainless steel.
• Dual quartz tube:100mm Dia. exterior tube and suspended by 80 mm Dia. interior tube. Metallic foil (Graphene Growth Substrate) will be wrapped around inside tube surface for CVD reaction
• Heating zone length: 440mm
  Constant temperature heating zone length: 120 (±1°C) @400~1100°C

• High purity Al2O3 insulation chamber ensures excellent temperature uniformity.
• Cooling fans are installed at the bottom of the furnace to ensure efficient ventilation.
• Max. Temperature: 1200°C and continuous temperature: 1100°C.
• Two Heating Zones controlled separately:

Dual direction sliding rails to ensure furnace moves smoothly.

• 200mm length for each heating zone, 400mm total heating length
• 250mm constant temperature zone if the two zones heating at same temperature
• 500oC max temperature difference if place a thermal block in between two zone

Power

Single heating zone
Power: 208-240VAC,  50/60Hz, single phase,  2.5KW ( 20A Breaker required)

Dual heating zone
Power:  208-240VAC,  50/60Hz, single phase,  4 KW ( 50A Breaker required) 
10 feet power cable with no plug (ask a licensed electrician to do the plug)

Heating Temperature

• Max. Temperature: 1100°C
• Continuous Temperature: 1000°C

Heating & Cooling Rate

Max. heating and cooling rates depend on working temperature.  Please click on tables below to see the Max. heating & cooling rate varies at different temperature range.

Fused Quartz Tubes

• High purity quartz tube:

Two pairs of vacuum sealed flanges with water cooling jackets and stainless steel needle valves

• Outside tube EQ-QZTube-101D-1400: OD:4"x ID: 3.8" X 55" Length (OD 100 x ID 96 x 1400 mm )
• Inside tube EQ-QZTube-80D-1800: OD:3.15: x ID x 2.95" x 70.8" Length (OD 80 x ID 75 x 1800 mm 

Vacuum Flanges

Using dual tube for inducing CVD growth on metal foil (wrapped around interior tube surface):

• 1-1. Shown below, one pair of SS304 flanges to seal both the outside tube and the space  between the outside tube and inside the tube (this space is considered as a reaction chamber).
• Left side flange: Barb fitting with needle valve as gas inlet, a digital vacuum gauge with measuring range 10^-4 to 1000 torr, water cooling inlet/outlet included
• Right side flange: Right angle valve with KF25 flange fitting, a vacuum release needle valve, water cooling inlet/outlet included

• 1-2. Leave both ends of inside tube open for gas cooling.
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Ultimate vacuum pressure:   10^-2 torr (by mechanical pump)
                                          10^-5 torr (by turbo molecular pump)

Temperature Controller

• PID automatic control with 30 programmable segments for precise control of heating rate, cooling rate and dwell time.
• Built-in over temperature alarm and protection allows for operation without any attendant.
• Over temperature protection and alarm allows for operation without attendant(s).
• +/- 1 ºC temperature accuracy.
• RS485 Communications Port.
• Advanced Temperature Control (Optional)
• MTS02-Y Temperature control software kit (for YD518P series controllers) + 15" laptop package is available at the options bar.  You may upgrade the temperature controller to the Eurotherm 3504 Temperature Controller which is fully compatible with LabVIEW. This package includes a Eurotherm 3504 programmer, a communication cable (RS485 - USB) and a software CD. Click the pic below to view the full spec of Eurotherm 3504 temperature controller. 
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Mass Flow Meters & Gas Mixing Station

• 4 precision mass flow controller ( MFC)  with digital display and adjusting knob are installed on the left bottom case to control gas flow rate:
• 4 Gas channels (contact MTI sales if need more)
• MFC 1: Control range from 0~100 SCCM
• MFC 2: Control range from 0~200 SCCM
• MFC 3: Control range from 0~200 SCCM
• MFC 4: Control range from 0~500 SCCM
• Flowing rate accuracy: ±1% FS
• Gas inlet and outlet: 1/4" Swagelok tube connector
• One 80mL gas mixing tank is installed in bottom case
• Each gas channel has a stainless steel needle valve for easy on/off  
• The flow rate is adjustable from the MFC panel

Vacuum Pump Station and valves

Optional 1:

Water Cooling Function

• Water cooling flanges require >= 10L/M water flow.
• You may use tap water as the coolant, but we strongly suggest you to use a recirculating water chiller for environmental considerations. Please click thumb below to order the water chiller at extra cost.

Optional Parts (building up a single tube furnace)

Dimension

Shipping 

• Shipping Weight: ~800 lb
• Shipping by freight with three pallets
• Crating fee will be applied

Warranty

One year limited manufacturer's warranty (Consumable parts such as processing tubes, O-rings, and heating elements are not covered by the warranty, please order replacements at related products below). 

Laptop, software & WiFi Control (Optional)

• Brand new laptop with Microsoft Window 10 and Microsoft Office 2013 (30 days free trial) for immediate use.
• Labview Based Temperature Control System enables user to edit temperature profile, manage heat-treatment recipe, record and plot data for MTI furnaces.
• A wireless remote control provides up to 300 meters operating range.
• Above features are available upon request at an extra cost (up to $1,000). Please contact us for more information.

·         Note: 
The software is only compatible with MTI’s Yudian Temperature Controller

     

Compliance

Application Notes

 

• Tube furnaces with quartz tubes are designed for using under vacuum and low pressure < 0.2 bars / 3 psi / 0.02 Mpa
• Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation.
• The flow rate for gasses should be limited to < 200 SCCM (or 200 ml/min) for reducing thermal shocks to the tube
• Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°C
• Click here to learn How to set up quartz/ ceramic tube and vacuum flange for MTI Tube furnace.
• One slide stopping clamp is included for holding the position of the furnace.

• After CVD, the graphene must be transferred from the metal catalyst to another substrate for most applications. By using the graphene transfer tape, the residue can be low.
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Warning