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  • Email : [email protected]
  • Email : [email protected]
  • Add : No. 39, Xinchang Road, Xinyang, Haicang Dist., Xiamen, Fujian, China (Mainland)
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Slliding Furnace

1200°C Max Dual Sliding Tube Furnace with 50 mm Tube Flanges for TCVD

  • Model Number:

    TMAX-1200X-S-50-DFSL
  • Dimension(L*W*H):

    Size can be customized
  • Compliance:

    CE Certified
  • Warranty:

    Two years limited warranty with lifetime technical support
  • Payment:

    L/C D/A D/P T/T Western Union
  • Delivery Time:

    15 day
  • contact now
Product Details

1200°C Max Dual Sliding Tube Furnace with 50 mm Tube Flanges for TCVD


TMAX-1200X-S-50-DFSLis  a dual slidable furnace on the rail. It is a tool for thermal CVD with 2" ODx55"L Quartz tube & flanges and max 1200°C achievable working temperature. Two 2" tube furnaces can be slide on the sliding rail to find positions for source materials thermal evaporation/sublimation and film deposition. Sliding the furnace from one side to another can achieve max. heating and cooling rates up to 100°C/min.  Optional motorized sliding, MFC gas delivery and RF Plasma generator are available to build a flexible TCVD system easily at low cost.


SPECIFICATIONS

Furnace Structure

  • Both furnaces are double layer steel structure with 1200°C max. working temperature
  • Each Furnace has 200mm heating zone and 60 mm long constant temperature zone

  • One pair of sliding rails are installed on bottom of furnace, which allows furnace to be 
  • manually moved from side to side with max sliding distance 400 mm.

  • Vacuum flanges is installed for immediate use.

Power of furnace

 2.5 KW in total

Voltage

 AC 208-240V Single Phase, 50/60 Hz, 20 A air breaker required

Max. Temperature

1200°C (<1 hour)

Continuous Temperature

1100°C

Heating & Cooling Rates 

Heating Zone Length

200mm( ~8")  for each furnace

Constant Temperature Zone

60 mm (+/-1°C @ 400-1200°C)

Heating Elements

Fe-Cr-Al Alloy doped by Mo

Processing Tube Size

High purity fused quartz tube

Size:  50mm O.D x 44mm I.D x1400 mm Length 

Temperature Controller

  • Two furnaces are PID automatic control with 30 programmable segments for precise control of 
  • heating rate, cooling rate and dwell time.

  • Built-in over temperature alarm and protection allows for operation without an attendant.
  • Two K-type thermal couples are included. 
  • Optional:  
    • The furnace may be operated by PC by installing control module. Please order an MTS-02 control module at extra cost. 

    • If you order the PC control module together with the furnace, we will install and 
    • test it before shipping. 

    • We recommend you to order a computer (laptop) 

    • from us to avoid software installation problems.

           

Temperature Accuracy

+/ - 1°C

 Vacuum Flanges

  • Stainless steel vacuum flanges with a vacuum gauge are installed on both ends of the tube with heavy duty support. 

  • Optional flange with a KF25 vacuum port and digital vacuum gauge is available at extra cost.          
  •     

 Sliding Rails / Table

  • Double sliding rail made by Cr-plated steel
  • Sliding length: 1200 mm
  • Two slide stopping clamps are included for holding the position of the furnaces.

 Vacuum Level 

  • Limited by pump ( pump is not included, click on pictures to order )
    • 10E-5 torr can be achieved via molecular pump
    • 10E-2 torr can be achieved via a mechanical pump.

                  

Optional for upgrate

  • Motorized sliding is available upon request.
  • 1-9 chaanel gas mixing and delivery moudles is availle ( click the picture 2nd picture in below to order )

  • 100W - 500W  RF plasma generator for plasma enhanced processing is available upon request.

  •  This module allows you build your own Plasma Enhanced Thermal CVD system

                          

 Dimensions

  • Furnace: 340 x 300 x 400 mm
  • Total:1600 x 430 x 500 mm ( furnaces + sliding )
  •     

 Net Weight

~ 80 Kg

Shipping Package Size

70" x 45" x 45" (inch)

Shipping Weight

300 lbs

Warranty

Two years limited manufacturer's warranty (Consumable parts such as processing tubes, O-rings and heating elements are not covered by the warranty,

 please order replacements at related products below).

Laptop, software & WiFi Control(Optional)

  • Brand new laptop with Microsoft Window 10 and Microsoft Office 2013 (30 days free trial) for immediate use.
  • Labview Based Temperature Control System enables user to edit temperature profile, manage heat-treatment recipe, record and plot data for MTI furnaces.
  • A wireless remote control provides up to 300 meters operating range.
  • Above features are available upon request at an extra cost (up to $1,000). Please contact us for more information.

·         Note: 
The software is only compatible with MTI’s Yudian Temperature Controller

     

Compliance

  • CE Certified
  • All electric components ( >24V) are UL / MET / CSA certified
  • The furnace is ready to pass TUV(UL61010) or CSA certification at extra cost.                             

Application Notes

 

  • Tube furnaces with quartz tubes are designed for using under vacuum and low pressure <  0.2 bar / 3 psi / 0.02 MPa

  • Attention: A two-stage pressure regulator must be installed on gas cylinder to limit the pressure to below 3 PSI for safe operation.  
  • The flow rate for gasses should be limited to < 200 SCCM (or 200 ml/min) for reducing thermal shocks to the tube

  • Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°C

Warning

  • Fast sample cooling can be achieved by sliding the heating chamber away. Please wear protective gears such as heat resistant suit & gloves if you intend to do so. 
  • DO NOT TOUCH THE TUBE SURFACE WHEN IT IS HOT!

 1200°C Max Dual Sliding Tube Furnace

 

 

 


1.  We supply machines with battery technology support.

2.  We supply full set of lithium battery equipment for lab research, pilot scale research and production line.


 Vacuum Tube Furnace


1 Standard exported package: Internal anticollision protection, external export wooden box packaging.

2 Shipping by express, by air, by sea according to customers' requirements to find the most suitable way.

3 Responsible for the damage during the shipping process, will change the damage part for you for free.