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  • If you have questions, please contact us, all questions will be answered
  • WhatsApp : +86 13003860308
  • Email : David@tmaxcn.com
  • Email : Davidtmaxcn@gmail.com
  • Add : No. 39, Xinchang Road, Xinyang, Haicang Dist., Xiamen, Fujian, China (Mainland)
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Slliding Furnace

1200°C Max Dual Sliding Tube Furnace with 50 mm Tube Flanges for TCVD

  • Model Number:

    TMAX-1200X-S-50-DFSL
  • Dimension(L*W*H):

    Size can be customized
  • Compliance:

    CE Certified
  • Warranty:

    Two years limited warranty with lifetime technical support
  • Shipping Port:

    Xiamen
  • Payment:

    L/C D/A D/P T/T Western Union
  • Delivery Time:

    5 days
Product Details

1200°C Max Dual Sliding Tube Furnace with 50 mm Tube Flanges for TCVD


TMAX-1200X-S-50-DFSLis  a dual slidable furnace on the rail. It is a tool for thermal CVD with 2" ODx55"L Quartz tube & flanges and max 1200°C achievable working temperature. Two 2" tube furnaces can be slide on the sliding rail to find positions for source materials thermal evaporation/sublimation and film deposition. Sliding the furnace from one side to another can achieve max. heating and cooling rates up to 100°C/min.  Optional motorized sliding, MFC gas delivery and RF Plasma generator are available to build a flexible TCVD system easily at low cost.


SPECIFICATIONS

Furnace Structure

  • Both furnaces are double layer steel structure with 1200°C max. working temperature
  • Each Furnace has 200mm heating zone and 60 mm long constant temperature zone

  • One pair of sliding rails are installed on bottom of furnace, which allows furnace to be 
  • manually moved from side to side with max sliding distance 400 mm.

  • Vacuum flanges is installed for immediate use.

Power of furnace

 2.5 KW in total

Voltage

 AC 208-240V Single Phase, 50/60 Hz, 20 A air breaker required

Max. Temperature

1200°C (<1 hour)

Continuous Temperature

1100°C

Heating & Cooling Rates 

Heating Zone Length

200mm( ~8")  for each furnace

Constant Temperature Zone

60 mm (+/-1°C @ 400-1200°C)

Heating Elements

Fe-Cr-Al Alloy doped by Mo

Processing Tube Size

High purity fused quartz tube

Size:  50mm O.D x 44mm I.D x1400 mm Length 

Temperature Controller

  • Two furnaces are PID automatic control with 30 programmable segments for precise control of 
  • heating rate, cooling rate and dwell time.

  • Built-in over temperature alarm and protection allows for operation without an attendant.
  • Two K-type thermal couples are included. 
  • Optional:  
    • The furnace may be operated by PC by installing control module. Please order an MTS-02 control module at extra cost. 

    • If you order the PC control module together with the furnace, we will install and 
    • test it before shipping. 

    • We recommend you to order a computer (laptop) 

    • from us to avoid software installation problems.

           

Temperature Accuracy

+/ - 1°C

 Vacuum Flanges

  • Stainless steel vacuum flanges with a vacuum gauge are installed on both ends of the tube with heavy duty support. 

  • Optional flange with a KF25 vacuum port and digital vacuum gauge is available at extra cost.          
  •     

     Sliding Rails / Table

    • Double sliding rail made by Cr-plated steel
    • Sliding length: 1200 mm
    • Two slide stopping clamps are included for holding the position of the furnaces.

     Vacuum Level 

    • Limited by pump ( pump is not included, click on pictures to order )
      • 10E-5 torr can be achieved via molecular pump
      • 10E-2 torr can be achieved via a mechanical pump.

                      

    Optional for upgrate

    • Motorized sliding is available upon request.
    • 1-9 chaanel gas mixing and delivery moudles is availle ( click the picture 2nd picture in below to order )

    • 100W - 500W  RF plasma generator for plasma enhanced processing is available upon request.

    •  This module allows you build your own Plasma Enhanced Thermal CVD system

                              

     Dimensions

    • Furnace: 340 x 300 x 400 mm
    • Total:1600 x 430 x 500 mm ( furnaces + sliding )
    •     

     Net Weight

    ~ 80 Kg

    Shipping Package Size

    70" x 45" x 45" (inch)

    Shipping Weight

    300 lbs

    Warranty

    Two years limited manufacturer's warranty (Consumable parts such as processing tubes, O-rings and heating elements are not covered by the warranty,

     please order replacements at related products below).

    Laptop, software & WiFi Control(Optional)

    • Brand new laptop with Microsoft Window 10 and Microsoft Office 2013 (30 days free trial) for immediate use.
    • Labview Based Temperature Control System enables user to edit temperature profile, manage heat-treatment recipe, record and plot data for MTI furnaces.
    • A wireless remote control provides up to 300 meters operating range.
    • Above features are available upon request at an extra cost (up to $1,000). Please contact us for more information.

    ·         Note: 
    The software is only compatible with MTI’s Yudian Temperature Controller

         

    Compliance

    • CE Certified
    • All electric components ( >24V) are UL / MET / CSA certified
    • The furnace is ready to pass TUV(UL61010) or CSA certification at extra cost.                             

    Application Notes

     

    • Tube furnaces with quartz tubes are designed for using under vacuum and low pressure <  0.2 bar / 3 psi / 0.02 MPa

    • Attention: A two-stage pressure regulator must be installed on gas cylinder to limit the pressure to below 3 PSI for safe operation.  
    • The flow rate for gasses should be limited to < 200 SCCM (or 200 ml/min) for reducing thermal shocks to the tube

    • Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°C

    Warning

    • Fast sample cooling can be achieved by sliding the heating chamber away. Please wear protective gears such as heat resistant suit & gloves if you intend to do so. 
    • DO NOT TOUCH THE TUBE SURFACE WHEN IT IS HOT!

    tube furnace

    1200°C Max Dual Sliding Tube Furnace