Four Nozzles Multilayer Spin Coater Unit Supplier For Large Wafer With Optional Spray Heads

Category

Details

Features

• Combines spin and spray coating for dense, uniform liquid-phase deposition on large substrates (up to 12").

• Four spray heads enable multi-layer coating via programmable touchscreen control.

• Applications: Low-temperature precipitation (e.g., RF/ microwave ferrites), polymer coating, powder/composite coating, and coating on patterned/uneven substrates.

Spin Coater

• Vacuum chuck: Adjustable holders for substrates up to 12" diameter or 8" square.

• Includes oil-less vacuum pump (controlled by the spin coater).

• Spin speed: 300–3000 rpm (adjustable).

• Safety note: Limit to 2000 rpm for wafers >8".

Spray Nozzles

• Three selectable types:

- Standard: Four compressive gas-driven nozzles - Optional: Four 40KHz ultrasonic nozzles + generator - Optional: Four 120KHz ultrasonic nozzles + generator • Note: Higher frequency = finer atomization/thinner coating but higher cost.

Peristaltic Pumps

• Four pumps for delivering up to four solutions as programmed.

• Flow rate: 0.05–380 mL/min (programmable).

• Sequential injection during spinning (adjustable flow rate/duration).

• Solenoid valves prevent cross-contamination.

Heating Cover (Optional)

• Ring-type halogen lamp heating element.

• Includes digital controller (±1°C accuracy).

• Max. temperature: 100°C.

Control Panel

• Touchscreen programs:

- Spin speed (100–3000 rpm, fixed steps).

- Solution injection sequence (Pumps 1–4).

- Injection time per pump.

- Cycle count.

Utility Requirement

• Power: 208–240 VAC, 50/60 Hz, 3000 W total.

Net Weight

• 160 lbs.

Shipping Details

• Package 1: 423 lbs, 48×40×42".

• Package 2: 155 lbs, 48×40×35".

Compliance

• CE Certified.

Warranty

• 1-year limited warranty + lifetime support.