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  • Email : [email protected]
  • Email : [email protected]
  • Add : No. 39, Xinchang Road, Xinyang, Haicang Dist., Xiamen, Fujian, China (Mainland)
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Sputtering Coater

Lab 3 Heads 1 Inch RF Plasma Magnetron Sputtering Coater Machine with DC Magnetron Sputtering

  • Model Number:

    VTC-3RF
  • Compliance:

    CE Certified
  • Warranty:

    One Year limited warranty with lifetime support
  • MOQ:

    1
  • Payment:

    L/C D/A D/P T/T Western Union
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Product Details

3 Heads Compact 1 Inch RF Plasma Magnetron Sputtering Coater, with DC Magnetron Sputtering Option


 VTC-3RF is a three head 1" RF Plasma magnetron sputtering system designed for non-metallic thin film coating, mainly for multilayer oxide thin films. It is the most cost-effective coater for researching in the new generation of oxide thin films. DC magnetron sputtering option is available upon request for metallic film deposition, enabling three DC, one RF / two DC, and two RF / one DC sputtering head configurations.


SPECIFICATIONS


Input Power

  • Single phase 220 VAC, 50 / 60 Hz
  • 1000 W (including vacuum pump and water chiller)
  • If the voltage is 110 V, a 1500 W transformer can be ordered at TMAX.

Power Source


  

  • 13.5 MHz, 100 W RF generator with manual matching is included and connected to the sputtering heads
  • Continuous working time:
    • 100W: ≤ 1 hour
    • 80W: ≤ 1.5 hours
    • 70W: ≤ 2 hours
    • 60W: ≤ 4 hours
    • 50W: ≤ 8 hours
  • Load range: 0 – 80  adjustable. Tuning range: -200j – 200j adjustable
  • The rotatable switch can activate one sputtering head at a time. Sputtering heads can be switched “in the plasma” (no breaking of vacuum and plasma during a multilayer process)
  • With a DC power supply, the coater can be easily modified into 1” DC sputtering sources for metallic film deposition, enabling three DC, one RF / two DC, and two RF / one DC sputtering head configurations (Bottom left picture. Please select from the Product Options)
  • Optional 300 W auto-match RF generator is available at extra cost 

   

Magnetron Sputtering Head


  • Three 1" magnetron sputtering heads with water cooling jackets are included and inserted into quartz chamber via quick clamps
  • RF cable replacement can be purchased at TMAX
  • One manually operated shutter is built on the flange (See Pic #3)    
  • One 10 L/min digitally controlled recirculating water chiller is included for cooling sputtering heads

Sputtering Target

  • Target size requirement: 1" diameter x 1/8" thickness max
  • Sputtering distance range: 50 – 80 mm adjustable
  • Sputtering angle range: 0 – 25° adjustable 
  • 1" diameter Cu target and Al2O3 target are included for demo testing
  • Various oxide 1” sputtering targets are available upon request at extra cost
  • For target bonding, 1 mm and 2 mm copper backing plates are included. Silver epoxy (Pic #1) and extra copper backing plates (Pic #2) can be ordered at TMAX

Vacuum Chamber

  • Vacuum chamber:  256 mm OD x 238 mm ID x  276 mm Height, made of high purity quartz
  • Sealing flange: 274 mm Dia. made of Aluminum with high-temperature silicone O-ring
  • Stainless steel shield cage is included for 100% shielding of RF radiation from the chamber
  • Max vacuum level: 1.0E-5 Torr with optional turbo pump and chamber baking 

Sample Holder

  • Sample holder is a rotatable and heatable stage made of ceramic heater with stainless steel cover
  • Sample holder size: 50 mm Dia. for. 2" wafer max (See picture below)
  • Rotation speed: 1 - 10 rpm adjustable for uniform coating
  • The holder temperature is adjustable from RT to 600 °C max (5 min max at 600 °C; 2 hr max at 500 °C) with accuracy +/- 1.0 °C via a digital temperature controller

       

Vacuum Pump  

  • KF40 vacuum port is built in for connecting to a vacuum pump.
  • Vacuum level: 1.0E-2 Torr with included dual stage mechanical pump
  • 1.0E-5 Torr with optional turbo pump           

Optional

  • Precision quartz thickness sensor is optional. It can be built into the chamber to monitor coating thickness with accuracy 0.1 Å (water cooling required) 
    • Easy USB connection to PC for remote thickness and coating speed monitoring
    • 5 pcs quartz sensors (consumable) are included 
    • Remote PC control of the temperature controller is optional
    • Easy USB connection to PC for remote temperature control
    • Temperature control software is included. The module is compatible with LabView
  • For DC magnetron sputtering, turbo pump is recommended (Pic #3)
  • Reactive sputtering with N2 or O2 is available with optional gas mixing control station.

Size

  • 540 mm L x 540 mm W x 1000 mm H

Net Weight

  • 60 kg

Compliance

  • CE approval
  • MET Certification (UL 1450) is available upon request at extra cost, please contact our sales representative for quote. 

               

Warranty 

  • One years limited warranty with lifetime support 

Application Notes
  

  • This compact 1" RF magnetron sputtering coater is designed for coating oxide thin films on oxide single crystal substrates, which usually does not need high vacuum set-up
  • A two-stage pressure regulator (not included) should be installed on the gas cylinder to limit the output pressure of gas to below 0.02 MPa for safe usage. Please use > 5N purity Ar gas for plasma sputtering
  • For the best film-substrate adhesion strength, please clean the substrate surface before coating:
    • Ultrasonic cleaning with the following sequential baths - (1) acetone, (2) isopropyl alcohol - to remove oil and grease. Blow dry the substrate with N2, then hot bake in vacuum to remove absorbed moisture
    • Plasma cleaning may be needed for surface roughening, surface chemical bonds activation, or additional contamination removal
    • A thin buffer layer (~5 nm), such as Cr, Ti, Mo, Ta, could be applied to improve adhesion of metals and alloys
  • For best performance, the non-conductive targets must be installed with a copper backing plate. Please refer to the instruction video below (#3) for target bonding
  • TMAX supplies single crystal substrate from A to Z 
  • TMAX RF Plasma Sputtering Coaters have successfully coated ZnO on Al2O3 substrate at 500 °C (XRD profile in Pic #5)
  • Test the flexibility of the thin film/coated electrode with EQ-MBT-12-LD mandrel bending tester.
  • HIGH VOLTAGE! Sputtering heads connect to high voltage. For safety, the operator must shut down the RF generator before sample loading and target changing operations
  • DO NOT use tap water in water chiller. Use coolant, DI water, distilled water, or anti-corrosive additives with water

Plasma Sputtering Coater

 

 


1.  We supply machines with battery technology support.

2.  We supply full set of lithium battery equipment for lab research, pilot scale research and production line.


Rolling Cylinder Press


1 Standard exported package: Internal anticollision protection, external export wooden box packaging.

2 Shipping by express, by air, by sea according to customers' requirements to find the most suitable way.

3 Responsible for the damage during the shipping process, will change the damage part for you for free.