Type series compound molecular pump unit is composed of F160/620 series compound molecular pump performance or FF - 160/500 f series compound molecular pump, pump level before, partition bleed valve, former level line, water protector, molecular pump power supply, high vacuum test system (compound vacuum gauge), control the power assembly on the rack and become clean ultra-high vacuum equipment. Easy installation, simple operation, easy connection, reliable performance and can be widely used for surface analysis, accelerator technology, semiconductor equipment, plasma technology, electric vacuum device manufacturing and vacuum technology in various fields.