Multi-layer Spin Spray Coater Manufacturer With 3 Nozzles For 12" Wafer 3K RPM

Category

Details

Features

• Combines spinning and mist spraying for dense and uniform liquid-phase coating on large substrates. 

• Three spray heads enable programmable multi-layer coating via the touch screen control panel.

Spin Coater

• Vacuum chuck with adjustable holders for substrates up to 12" diameter or 8" square. 

• Includes one oilless pump (controlled by the spin coater).

• Spin speed: 10 – 3000 rpm (adjustable). 

• Safety note: For wafers >8", limit speed to 2000 rpm.

Spray Nozzles

• Three 40 mm compressive gas-driven spray heads (standard).

Peristaltic Pumps

• Three pumps for programmable multi-solution injection (one at a time).

• Solenoid valves prevent cross-contamination.

• Flow control: 0.1 – 100 rpm (~0.14 – 140 ml/min).

Heating Cover (Optional)

• Halogen lamp ring heater (extra cost).

• Digital controller (±1°C accuracy).

• Max. temperature: 100°C.

Control Panel

• Touchscreen for programming:

Solution sequence (1–3 pumps), Injection time per pump, Cycle count.

• Manual spin speed adjustment (10–3000 rpm, non-programmable).

Utility Requirement

AC 110V/220V, 50/60 Hz.

Net Weight

135 lbs (61.2 kg).

Dimensions

• Coater: 600 × 740 × 500 mm (L×W×H). 

• Controller: 510 × 460 × 200 mm (L×W×H).

Shipping Weight & Dimensions

310 lbs (140.6 kg),

47" × 38" × 51" (119 × 97 × 130 cm).

Compliance

CE Certified.

Warranty

1-year limited warranty + lifetime support

Consumables

40 mm spray heads, rubber plugs, PTFE tubing (6.4/6 mm OD), O-rings.