Ultrasonic Heated Spin Spray Coater Integrated With Fume Hood For 12" Wafer & 3K RPM,

Ultrasonic Heated Spin Spray Coater Integrated With Fume Hood For 12" Wafer & 3K RPM

Ultrasonic Spin-Spray Coater TMAX-KJ12U is an all-in-one film preparation equipment that combines ultrasonic atomization, spin coating, and drying functions for substrates up to 12" (300 mm). The liquid is delivered by a precision syringe pump with an optional heating function. The ultrasonic atomizer can swing over the substrate to ensure coating uniformity (supports up to 4 ultrasonic heads). After coating, the film can be heated and quickly dried. The equipment features a touchscreen control panel for precise parameter adjustment, including ultrasonic power, spray rate, spinning speed, and heating temperature.

Applications: Thin-film preparation for perovskite solar cells, composites, and flexible films.

Power

· Voltage: 208–240 VAC, 50/60 Hz, single-phase

· Total power: 1800 W

Spin Coater

· Vacuum chuck for substrates up to 12" diameter or 8" square

· Includes an oil-less vacuum pump (controlled by the spin coater)

· Programmable spin speed: 300–3000 rpm

Ultrasonic Spray Nozzle

· 1 ultrasonic generator (up to 50 kHz, 100 W) with 2 spray nozzles

· Nozzles equipped with KF-25 adapters:

o Cylindrical type: Narrower spray (~20 mm diameter)

o Cone type: Wider spray (~40 mm diameter)

· Recommended compressed inert gas/air pressure for aqueous solutions: ~2 psi (not included)

· Fluid viscosity range: 1–50 mPa·s (cP)

· Particle size: 10–20 microns (suspension liquid), ≤10% solid content

· Flow rate: 0.6 pL–4 mL/min

· Swing arm for mounting ultrasonic spray head:

o Swing speed: 1°–20°/s

· Optional: 2–4 additional ultrasonic swing spray heads for layer-by-layer coating (extra cost)

Syringe Pump

· Includes 1 LCD touchscreen-controlled syringe pump for liquid delivery

· Includes 1 × 50 mL syringe; compatible with syringes of 0.4–30 mm diameter

· Adjustable pumping rate: 0.01–0.99 mm/min (0.08–35 mL/min for the included 50 mL syringe)

· Optional: Heated or multi-channel syringe pump available (extra cost)

Control Panel (Touchscreen)

· Adjustable parameters:

o Spin speed: 300–3000 RPM

o Nozzle swing speed: 1–20°/s

o Temperature: RT–50°C

o Spraying time: 1–999 seconds

o Syringe pump speed: 0.6 pL–4 mL/min

Fume Hood & Heating

· Built-in fume hood with 4" venting port

· Integrated IR heater (up to 80°C) for post-coating film drying

· LED light inside the hood

Utility Requirements

· Gas: ~2 psi compressed air for ultrasonic nozzle (air compressor available for order)

· Note: If using a gas cylinder instead of an air compressor, a two-stage pressure regulator must be installed to limit pressure for safe operation.

Dimensions & Net Weight

· Weight: 250 lbs

Compliance

· CE Certified

Warranty

· 1-year limited warranty with lifetime support.

Application Notes

1. Avoid overflushing the water bowl/base with liquid to prevent motor shaft damage. Use a fabric cloth to wipe residues.

2. For optimal coating quality, pre-clean substrates with plasma or UV-Ozone cleaner to reduce surface tension.

3. Reference Articles:

o Strong Magnetoelectric Coupling in Ferrite/Ferroelectric Multiferroic Heterostructures Derived by Low-Temperature Spin-Spray Deposition

o Spin- and Spray-Deposited Single-Walled-Carbon-Nanotube Electrodes for Organic Solar Cells

o Rapid Assembly of Functional Nanocomposite Films Using Spin-Spray Layer-by-Layer Processing