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Spin Coater

Precision Atmosphere-Controlled Vacuum 10K RPM Spin Coater For Thin Film

  • Model Number:

    TMAX-KJ6AV
  • Dimension(L*W*H):

    1000mm(W)X1000mm(D)X1650mm(H)
  • Net Weight:

    200KG
  • Compliance:

    CE Certified
  • Warranty:

    Two Years limited warranty with lifetime support
  • Shipping Port:

    Xiamen
  • Payment:

    L/C D/A D/P T/T Western Union
  • Delivery Time:

    5 days
Product Details

Precision Atmosphere-Controlled Vacuum 10K RPM  Spin Coater For Thin Film



TMAX-KJ6AV is an atmosphere-controllable spin coater with Polypropylene air tightening, which can perform spin coating under either a vacuum or inert gas atmosphere. The sample holder accommodates wafers up to 6". The digital control box is separate from the spin coater, enabling remote operation. The spinning speed is adjustable from 500 to 10,000 rpm with two programmable segments. The package includes a two-stage vacuum pump, digital vacuum gauge, and a 20ml syringe for immediate use.


SPECIFICATIONS

Category

Sub-Item

Specification

General

Type

Atmosphere-controllable (vacuum / inert gas)

 

Material

Polypropylene (PP) corrosion-resistant casing

 

Control System

Remote digital control (6-step programmable)

Performance

Speed Range

500-10,000 rpm (6 programmable segments)

 

Duration Control

Up to 999 seconds per step

 

Sample Size

Up to 6" wafers

Vacuum System

Chamber Vacuum Pump

156 L/min two-stage rotary vane pump (max. 110 torr)

 

Chuck Vacuum Pump

Dry pump (dedicated for vacuum chuck)

 

Filtration

Standard in-line filter (prevents liquid backflow)

Power Supply

Standard Input

220V, 50/60Hz, 1000W max

 

Optional Input

110V (requires 1500W transformer)

Sample Holding

Vacuum Mode

Mechanical fixture (liquid injection under vacuum)

 

Inert Gas Mode

Vacuum chuck (liquid injection under inert gas)

Dimensions

Main Unit

590mm(H) × 250mm(Ø) (chamber: 330mmH x 150mmØ)

 

Controller Box

330mm × 380mm × 165mm

Shipping

Package Size

1016×762×762mm (40×30×30 in)

 

Weight

46 kg (100 lbs)

Certification

Compliance

CE Certified

Warranty

Coverage

1-year limited (lifetime support)


Operational Notes:
✔ Dual Pump System:

· Chamber Pump (156 L/min) for vacuum atmosphere

· Chuck Pump (dry pump) for sample fixation in inert gas mode

✔ Filter Included: Prevents liquid backflow into pumps


Safety Warnings:

1. Avoid liquid overflow in water bowl/base

2. Use fabric cloth for cleaning residues

3. Follow recommended cleaning procedures

spin coater device