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Spin Coater

6-inch 6000 RPM Desktop Wafer Spin Coater With Inert Gas Ar Compatible

  • Model Number:

    TMAX-KJ6A

  • Dimension(L*W*H):

    1000mm(W)X1000mm(D)X1650mm(H)

  • Net Weight:

    200KG

  • Compliance:

    CE Certified

  • Warranty:

    Two Years limited warranty with lifetime support

  • Shipping Port:

    Xiamen

  • Payment:

    L/C D/A D/P T/T Western Union

  • Delivery Time:

    5 days
Product Details

6-inch 6000 RPM Desktop Wafer Spin Coater With Inert Gas Ar Compatible



Applicable for surface coating processes in semiconductors, crystals, optical discs, plate-making, etc. This machine can prepare coatings using strongly acidic or alkaline solutions. The TMAX-KJ6A chamber does not support vacuum extraction; instead, it uses vacuum chuck adsorption to secure samples on the loading tray. The device can store 12 programs, each containing 6 operation stages. Different rotation speeds at each stage allow gradual acceleration to maximum speed, ensuring uniform thin-film deposition while minimizing material waste. The chamber lid provides optional heating functionality to facilitate coating with high-viscosity materials.


Key Features

Feature

Specification

Program Storage

12 groups, 6 stages each

Speed Adjustment Range

100-2000 rpm/s per stage

Time Range

0-60s per stage

Vacuum Adsorption

Up to -0.08MPa

Centering Tool

Included, Reduces vibration and fly-off

Chuck Options

changeable

Motor

24V DC brushless

Stepless speed control

Glove Box Compatibility

Vacuum Chamber only

Inert Gas Support

Ar/N₂ compatible

Vacuum Pump

Oil-free twin-piston: No oil contamination

Chamber Material

Polypropylene: Chemical resistant

Safety Feature

Auto-deceleration when opened

Control System

PCB MCU + LCD display


Installation Requirements

Parameter

Requirement

Temperature

0-45°C

Humidity

10-85% RH (at 25°C, no condensation)

Environment

No strong vibrations/corrosive gases

Water Drainage

Equipped with outlet

Power Supply

AC220V 50Hz, 10A (grounded)

Vacuum Flow

≥70L/min

Workbench

800×600×700mm (≥100kg load)


Technical Parameters

Parameter

Specification

Power Input

AC220V 50Hz (10A fuse, φ5×20mm)

Power Consumption

≤150W (without pump)

Chamber Material

Polypropylene

Chuck Size

Φ100mm

Speed Range

500-6000 rpm

Speed Stability

±1%

Control Method

PCB MCU + LCD

Heating (Optional)

RT-100°C (±2°C)

Heating Power

AC220V 1000W


Dimensions & Weight

Component

Size

Weight

Main Unit

Φ250×360mm

15kg

Control Box

330×380×150mm

 


Standard Accessories:

1. Φ100mm vacuum chuck ×1

2. O-ring ×1

3. Liquid dropper ×1

4. Dropper stand ×1

5. Centering tool ×1

6. Oil-free vacuum pump ×1

Optional Accessories:

1. Imported pipette

2. Domestic pipette gun

spin coater supplier

 

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