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Sputter Coater for SEM Sample Preparation

PVD Magnetron Sputter Coating System For SEM & Wafer Sample Preparation

  • Model Number:

    TMAX-ZK-JS04
  • Input Power:

    2000W
  • Compliance:

    CE Certified
  • Warranty:

    One Year limited warranty with lifetime support
  • Shipping Port:

    Xiamen
  • MOQ:

    1
  • Payment:

    L/C D/A D/P T/T Western Union
  • Delivery Time:

    5 days
Product Details

PVD Magnetron Sputter Coating System For SEM & Wafer Sample Preparation

 

 

 

Model:  TMAX-ZK-JS04- DC Ion Sputtering Coater


Technical Specifications

Parameter

Specification

Target Materials

Standard: Au (Gold), 57mm diameter × 0.1mm thick

 Optional: Pt (Platinum)

Standard Sample Holder

Holds 12 SEM stubs, height adjustment range: 60mm

Rotating/Tilting Stage (Optional)

Rotation: 0–60 rpm (continuously adjustable) 

Tilt: -90° to +90° (continuously adjustable) 

Standard rotating platform: 40mm diameter (holds 4 sample holders, custom sizes available) 

Dual locking mechanism for secure fixation

Sputtering Current

5–30mA (microprocessor-controlled, programmable)

Meters

Vacuum: Atm – 1×10⁻³ mbar 

Current: 0–99mA

Control Method

Microprocessor with Start/Pause buttons 

Programmable time (1–999s) 

Auto-pumping, sputtering, and venting

Vacuum System

Pumping speed: 133 L/min 

Ultimate vacuum: 10⁻⁴ mbar 

Noise level: 56 dB


Key Features & Applications

1. Precision and Flexibility

· Adjustable sputtering current (5–30mA) and rotating/tilting stage enable uniform thin-film deposition for diverse sample geometries.

· Dual locking mechanism prevents sample displacement during operation.

2. High-Quality Coating

· Gold (Au) and Platinum (Pt) targets ensure high-purity conductive coatings for SEM and analytical applications.

3. Automated & User-Friendly Operation

· Programmable controls and auto-venting enhance efficiency and safety.

4. Compact & Low-Noise Design

· Stainless steel chamber (120mm × 75mm) with observation window (120mm × 45mm) provides durability and visibility.

· Low 56 dB noise level ensures a comfortable working environment.


Ideal Applications

· SEM sample preparation (conductive coating)

· Thin-film deposition for research and industrial applications

· Multi-sample processing (supports 12 SEM stubs)

· Angle-dependent deposition (with optional rotating/tilting stage)

This sputtering system is optimized for laboratories requiring high precision, automation, and versatile coating capabilities.

PVD System