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Sputter Coater for SEM Sample Preparation

Nano Vacuum Magnetron Ion Sputtering Coater For Thin Film Fabrication

  • Model Number:

    TMAX-ZK-JS05
  • Input Power:

    2000W
  • Compliance:

    CE Certified
  • Warranty:

    One Year limited warranty with lifetime support
  • Shipping Port:

    Xiamen
  • MOQ:

    1
  • Payment:

    L/C D/A D/P T/T Western Union
  • Delivery Time:

    5 days
Product Details

Nano Vacuum Magnetron Ion Sputtering Coater For Thin Film Fabrication

 

 

Model:  TMAX-ZK-JS05- Compact Ion Sputtering Coater


Overview

The TMAX-ZK-JS05 Compact Ion Sputtering Coater is designed for depositing conductive gold films on samples for scanning electron microscopy (SEM). With user-friendly operation, it is an essential tool for sample preparation in small to medium-sized SEM laboratories.


Key Applications

· Gold ion sputtering for SEM sample coating.

· Compatible with target materials: Au, Pt, Cr, Ag, Ti, Cu, Ni, Au-Pd alloy, etc.


Technical Specifications

Category

Specification

Chamber Material

Glass

Chamber Dimensions

Ø100 mm (diameter) × 130 mm (height)

Sample Stage (Small)

Ø40 mm (holds 6 sample cups simultaneously)

Sample Stage (Large, Optional)

Ø60 mm

Gold Target Size

Ø58 mm

Vacuum Pump

Two-stage direct-drive rotary vane pump (1 L/s)

Vacuum Measurement

Pirani gauge

Vacuum Protection

20 Pa with fine-adjustment gas inlet valve

Working Gases

Air / Argon (dedicated inlet with flow control)


Features & Advantages

· Robust Design – Special sealing structure minimizes glass chamber damage.
· High Compatibility – Supports Au, Pt, Cr, Ag, Ti, Cu, Ni, and Au-Pd alloy targets.
· Precision Control – Adjustable gas flow and vacuum protection ensure uniform coatings.
· Efficient Workflow – Dual-stage platform allows batch processing (6 samples at once).


Recommended Applications

✔ SEM Sample Prep – Ideal for non-conductive specimen coating.
✔ Materials Research – Thin-film deposition for nanotechnology studies.
✔ Industrial QC – Reliable performance for repeatable conductive layering.

 

Vacuum Magnetron Sputtering