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Nano Vacuum Magnetron Ion Sputtering Coater For Thin Film Fabrication
Model Number:
TMAX-ZK-JS05Input Power:
2000WCompliance:
CE CertifiedWarranty:
One Year limited warranty with lifetime supportShipping Port:
XiamenMOQ:
1Payment:
L/C D/A D/P T/T Western UnionDelivery Time:
5 days
- WhatsApp : +86 18659217588
- Email : David@tmaxcn.com
- Email : Davidtmaxcn@gmail.com
- Wechat : 18659217588
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Lab PVD Ion Sputtering Coater For Metal and Carbon LayerNext:
PVD Magnetron Sputter Coating System For SEM & Wafer Sample Preparation
Nano Vacuum Magnetron Ion Sputtering Coater For Thin Film Fabrication
Model: TMAX-ZK-JS05- Compact Ion Sputtering Coater
Overview
The TMAX-ZK-JS05 Compact Ion Sputtering Coater is designed for depositing conductive gold films on samples for scanning electron microscopy (SEM). With user-friendly operation, it is an essential tool for sample preparation in small to medium-sized SEM laboratories.
Key Applications
· Gold ion sputtering for SEM sample coating.
· Compatible with target materials: Au, Pt, Cr, Ag, Ti, Cu, Ni, Au-Pd alloy, etc.
Technical Specifications
Category |
Specification |
Chamber Material |
Glass |
Chamber Dimensions |
Ø100 mm (diameter) × 130 mm (height) |
Sample Stage (Small) |
Ø40 mm (holds 6 sample cups simultaneously) |
Sample Stage (Large, Optional) |
Ø60 mm |
Gold Target Size |
Ø58 mm |
Vacuum Pump |
Two-stage direct-drive rotary vane pump (1 L/s) |
Vacuum Measurement |
Pirani gauge |
Vacuum Protection |
20 Pa with fine-adjustment gas inlet valve |
Working Gases |
Air / Argon (dedicated inlet with flow control) |
Features & Advantages
· Robust Design – Special sealing structure minimizes glass chamber damage.
· High Compatibility – Supports Au, Pt, Cr, Ag, Ti, Cu, Ni, and Au-Pd alloy targets.
· Precision Control – Adjustable gas flow and vacuum protection ensure uniform coatings.
· Efficient Workflow – Dual-stage platform allows batch processing (6 samples at once).
Recommended Applications
✔ SEM Sample Prep – Ideal for non-conductive specimen coating.
✔ Materials Research – Thin-film deposition for nanotechnology studies.
✔ Industrial QC – Reliable performance for repeatable conductive layering.
