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Sputter Coater for SEM Sample Preparation

Thermal Evaporation Physical Vapor Deposition Equipment For Metal Conductive Film

  • Model Number:

    TMAX-BY-ZD05
  • Input Power:

    2000W
  • Compliance:

    CE Certified
  • Warranty:

    One Year limited warranty with lifetime support
  • Shipping Port:

    Xiamen
  • MOQ:

    1
  • Payment:

    L/C D/A D/P T/T Western Union
  • Delivery Time:

    5 days
Product Details

Thermal Evaporation Physical Vapor Deposition Equipment For Metal Conductive Film 

 

 

 

TMAX-BY-ZD05| Ion Sputtering & Evaporation Coater for SEM


Specification

Integrated withsputtering and thermal evaporation functions, this compact and user-friendly instrument is designed for high-quality thin-film deposition, particularly for SEM sample preparation. It supports multiple metal targets for sputtering and carbon fiber evaporation, offering precise control over coating parameters.


Technical Specifications

Parameter

Value

Dimensions

305 mm × 400 mm × 390 mm (W×D×H)

Vacuum Chamber Material

Borosilicate glass, 160 mm × 110 mm (D×H)

Target (Upper Electrode)

50 mm × 0.1 mm (D×H)

Sputtering Targets

Au (standard), optional Ag, Pt, etc.

Target Size

φ50 mm

Sample Stage

Compatible with 50 mm/70 mm diameter; customizable

Sputtering Voltage

0–1600 V (DC), adjustable

Sputtering Current

0–50 mA

Sputtering Timer

0–360 s

Carbon Evaporation Current

0–100 A (AC)

Evaporation Material

Carbon fiber

Evaporation Voltage

0–30 V

Evaporation Time

0–1 s

Gas Inlet Valve

Compatible with φ3 mm tubing

Process Gases

Multiple options

Power Supply

220 V (110 V optional), 50 Hz

Vacuum Pump

2L rotary vane pump (VRD-8, domestic)


Key Features

1. Dual-Function Design

·Combines ion sputtering (Au, Pt, Ag, Cu, etc.) and thermal evaporation (carbon fiber) for versatile applications.

·Ideal for high-resolution microscopy (SEM, TEM, EBSD) requiring ultra-fine carbon films (<1 nm).

2. Precision Control

·Adjustable sputtering currentvacuum pressure, and gas selection to optimize coating rate and particle size.

·Digital timer for reproducible processes.

3. Enhanced Sample Protection

·Conductive coatings eliminate charging effects in non-conductive samples.

·Carbon films protect beam-sensitive materials (e.g., biological/plastic samples) from electron beam damage.

4. Efficiency & Reliability

·Compact footprint with automated vacuum protection to prevent short circuits.

·Uniform film deposition with short processing time.


Applications

· Electron Beam-Sensitive Samples (e.g., polymers, biological tissues): Coating mitigates structural damage.

· Non-Conductive Materials: Metal layers (Au, Pt) dissipate charge, improving SEM imaging.

· Advanced Materials: Enhances conductivity and surface analysis (EBSD, microprobe) for semiconductors/composites.

 

 

 Thermal Evaporation System