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  • Laboratory Tube Furnace Laboratory 1200C Max. Two Zone High Temperature PECVD Tube Furnace (Optional Tube Dia) with Auto- Sliding

    1200ºC Max. Two Zone PECVD Tube Furnace (Optional Tube Dia) with Auto- Sliding TMAX-DSP-1200PECVD is a dual zone slidable PE-CVD tube furnace system consists of RF plasma source, with tube size and an integrated slidable rail, precision mass flow meter with gas mixing tank, and a high-quality oil-less vacuum pump. Such a PE-CVD furnace is a new tool to grow nanowire or graphene with the following benefits: 1. Lower temperature processing compared to conventional CVD. 2. High heating & cooling rate using sliding furnace. 3. 1200ºC Max. working temperature. 4. Offers a wide range of material deposition, such as Carbon & ZnO nanowire (or tube) and single layer grapheme.

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