products categories

contact us

  • If you have questions, please contact us, all questions will be answered
  • Email : [email protected]
  • Email : [email protected]
  • Add : No. 39, Xinchang Road, Xinyang, Haicang Dist., Xiamen, Fujian, China (Mainland)
Thermal Evaporation Coater

Ultrasonic High Vacuum Thermal Evaporation Coater Machine With Four Heating Sources (10-6 torr)

  • Model Number:

  • Compliance:

    CE Certified
  • Warranty:

    One Year limited warranty with lifetime support
  • MOQ:

  • Payment:

    L/C D/A D/P T/T Western Union
  • Delivery Time:

    15 day
Product Details

Ultrasonic High Vacuum Thermal Evaporation Coater Machine With Four Heating Sources (10-6 torr)


Input & Output Power

· Input: 208 - 240VAC, 20 A, 50/60 Hz, single phase  

· Total Power required:  8KW ( including pump)

· other 3 phase voltage is available upon request

· Output:  5VAC max.  and 300A Max.

Vacuum Chamber

 Ultra-High Vacuum Thermal Evaporation Coater

· Stainless steel chamber:  280mm ID. x 375 mm Height, ( ~23 Liter) Sand-blasting electrolytic polishing surface  

· 100 mm observation window  in front of chamber

· Hinged type door for easy sample loading

· Manually operated shutters are on top of each evaporation W boat, which allow evaporating 4 kinds of material one by one

· 4 KF40 ports built in chamber for connecting to necessary device

Vacuum Pump 
Ultra-High Vacuum Thermal Evaporation Coater

· High-speed turbo vacuum pump is included and connected to the vacuum chamber. ( pls click picture left above )

Vacuum speed:  600L/S

Vacuum level: 5.0x10-6  Torr ( after 40 minutes pumping )

Limit vacuum:   5.0x10-7  Torr  ( after baking at 100 -150°C)

Leaking rate:    5.0x10-7 Pa.

Vacuum port:  150 mm diameter

Evaporation Source
Sample Holder

Ultra-High Vacuum Thermal Evaporation Coater

· Four tungsten heating boats are included  supported by water cold electrodes

· Tungsten heating boat has dimension 70mm L x 12 mm W x 3 mm HSpare W boat is available at extra cost

· Each top of boat has a manual operation shutter 

· Built in manual shutter allows evaporation source can be used without contamination

· 100 mm diameter rotating sample holder is on top of the chamber with diameter 260mm, which can be heated up to 600°C max. via digital temperature controller with +/1 °C accuracy

· The distance between evaporation source and sample holder is 150-300 mm adjustable

          Ultra-High Vacuum Thermal Evaporation Coater    Ultra-High Vacuum Thermal Evaporation Coater   Ultra-High Vacuum Thermal Evaporation Coater

Thickness control optional

· One High-Resolution Film Thickness Monitor and Controller is optional click picture below to see detail specs )

· The accuracy of thickness control is 1.0A

              Ultra-High Vacuum Thermal Evaporation Coater

Control Unit

· Vacuum, thickness and power control are integrated into one control box

· Control Unit is separated from vacuum chamber for easy moving

· You may place the control unit on the top of vacuum station 

Overall Dimensions

L600mm× W860mm× H1500mm

Net Weight

600 kg

Facility Requirement  for Installation

· Space:  250 SF with height > 6 feet

· Power:  208 - 240V AC, single phase with Max 10KW ( 50A breaker)

· Water:   > 15L/minute flowing water required for electrode cooling.  You may order recirculating water chiller to save water by click picture below at extra cost.

              Ultra-High Vacuum Thermal Evaporation Coater

Application Notes

· Test the flexibility of the coated thin film/electrode with EQ-MBT-12-LD mandrel bending tester.

· Ultra-High Vacuum Thermal Evaporation Coater

Warranty & Certificate


Two years limited warranty with lifetime support

CE certified

Ultra-High Vacuum Thermal Evaporation Coater



1.  We supply machines with battery technology support.

2.  We supply full set of lithium battery equipment for lab research, pilot scale research and production line.

Rolling Cylinder Press

1 Standard exported package: Internal anticollision protection, external export wooden box packaging.

2 Shipping by express, by air, by sea according to customers' requirements to find the most suitable way.

3 Responsible for the damage during the shipping process, will change the damage part for you for free.