Input & Output Power

· Input: 208 - 240VAC, 20 A, 50/60 Hz, single phase  

· Total Power required:  8KW ( including pump)

· other 3 phase voltage is available upon request

· Output:  5VAC max.  and 300A Max.

Vacuum Chamber

· Stainless steel chamber:  280mm ID. x 375 mm Height, ( ~23 Liter) Sand-blasting electrolytic polishing surface  

· 100 mm observation window  in front of chamber

· Hinged type door for easy sample loading

· Manually operated shutters are on top of each evaporation W boat, which allow evaporating 4 kinds of material one by one

· 4 KF40 ports built in chamber for connecting to necessary device

Vacuum Pump 

· High-speed turbo vacuum pump is included and connected to the vacuum chamber. ( pls click picture left above )

o Vacuum speed:  600L/S

o Vacuum level: 5.0x10^-6  Torr ( after 40 minutes pumping )

o Limit vacuum:   5.0x10^-7  Torr  ( after baking at 100 -150°C)

o Leaking rate:    5.0x10^-7 Pa.

o Vacuum port:  150 mm diameter

Evaporation Source
&
Sample Holder

· Four tungsten heating boats are included  supported by water cold electrodes

· Tungsten heating boat has dimension 70mm L x 12 mm W x 3 mm H。 Spare W boat is available at extra cost。

· Each top of boat has a manual operation shutter 

· Built in manual shutter allows evaporation source can be used without contamination

· 100 mm diameter rotating sample holder is on top of the chamber with diameter 260mm, which can be heated up to 600°C max. via digital temperature controller with +/1 °C accuracy

· The distance between evaporation source and sample holder is 150-300 mm adjustable

Thickness control （optional）

· One High-Resolution Film Thickness Monitor and Controller is optional （click picture below to see detail specs )

· The accuracy of thickness control is 1.0A

Control Unit

· Vacuum, thickness and power control are integrated into one control box

· Control Unit is separated from vacuum chamber for easy moving

· You may place the control unit on the top of vacuum station 

Overall Dimensions

L600mm× W860mm× H1500mm

Net Weight

600 kg

Facility Requirement  for Installation

· Space:  250 SF with height > 6 feet

· Power:  208 - 240V AC, single phase with Max 10KW ( 50A breaker)

· Water:   > 15L/minute flowing water required for electrode cooling.  You may order recirculating water chiller to save water by click picture below at extra cost.

Application Notes

· Test the flexibility of the coated thin film/electrode with EQ-MBT-12-LD mandrel bending tester.

· 

Warranty & Certificate

 Two years limited warranty with lifetime support

CE certified