Ultrasonic Precision Coating Spray System Unit For Film Deposition Solution

General Parameters

· Overall Dimensions: 1500 × 1250 × 1900 mm

· Max. Coating Area: 500 × 500 mm

· Motion System: 3-axis (XYZ) servo-driven system with optional R-axis nozzle rotation mechanism

· Control Method: High-precision motion control card / 15.6" HD touchscreen / physical buttons

· Ultrasonic Nozzle: Standard configuration includes 1 set of TMAX ultrasonic nozzle (customizable multi-nozzle setups available)

· Application: Medium-scale production and large-area thin film fabrication

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Overview

The Ultrasonic Precision Coating System is designed for medium-scale production and large-area thin film fabrication. Featuring a streamlined structure with comprehensive functionality, the system integrates:

· XYZ 3-axis servo motion system (optional R-axis nozzle rotation)

· Advanced trajectory editing software for 2D patterns (e.g., rectangles, circles, triangles, curves)

· Compatibility with all TMAX ultrasonic nozzles

· Precision constant-flow syringe pump + digital display carrier gas system

· Optional upgrades: Ultrasonic dispersion feeding system, vacuum adsorption heated substrate, etc.

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Advantages

4× Efficiency
Ultrasonic atomization achieves up to 4× higher material utilization than conventional spraying, significantly reducing costs.

Nanoscale Film Thickness
Uniform coatings as thin as tens of nanometers with exceptional consistency.

Pressure-Free Atomization
Utilizes high-frequency ultrasonic vibration (no compressed air), eliminating substrate impact from high-pressure gas.

Premium Servo Motors & Enclosed Motion Modules

· Imported servo motors for all XYZ axes

· Fully enclosed linear screw modules with 0.01mm repeat positioning accuracy

· Extended operational lifespan

Ultrasonic Dispersion System
Optional TMAX dispersion feeder prevents particle sedimentation.

Control System

· Dedicated TMAX ultrasonic spray control software

· Integrated management of ultrasonic atomization, dispersion, syringe pump, carrier gas, heating stage, and vacuum adsorption

· Features:

o One-click template trajectory generation

o G-code editing for complex paths

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Technical Specifications

Standard Configuration

· Viscosity & Solid Content: ≤30 cps (suspensions ≤20–30% solids)

· Liquid Delivery: Precision syringe pump + biomedical-grade injector (0.1 μL/min accuracy)

· Dry Film Thickness: 20 nm – 100 μm (solution/substrate-dependent)

· Input Voltage: 220V ±10%, 50–60 Hz

· Solution Conversion Rate: ≥95% (multiple times higher than conventional two-fluid nozzles)

· Droplet Size: 15–45 μm avg. (frequency-dependent; higher frequency = smaller droplets)

· Nozzle Frequency: 30–200 kHz (multiple options available)

Optional Upgrades

1. Ultrasonic Dispersion Feeding System

o Continuous nanoparticle dispersion during spraying

o Reduces sedimentation and enhances film uniformity.

2. Heated Drying Platform

o Aerospace-grade perforated aluminum or microporous ceramic platform

o Precise temperature control up to 200°C.

3. Vacuum Adsorption Platform

o Multi-channel vacuum generator with zone control

o Secures thin-film substrates without deformation.

4. Nozzle Alignment Device

o Laser-assisted precision alignment.