10K RPM Spin Coater Supplier With Ultrasonic Spray - 5 Wafer Capacity & Optional PTFE Heating Cover For Sale,manufacturers,suppliers-Tmax Battery Equipments Limited.

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If you have questions, please contact us, all questions will be answered
WhatsApp : +86 18659217588
Email : David@tmaxcn.com
Email : Davidtmaxcn@gmail.com
Add : No. 39, Xinchang Road, Xinyang, Haicang Dist., Xiamen, Fujian, China (Mainland)

products

10K RPM Spin Coater Supplier With Ultrasonic Spray - 5" Wafer Capacity & Optional PTFE Heating Cover

Model Number:
TMAX-KJ5U
Dimension(L*W*H):
1000mm(W)X1000mm(D)X1650mm(H)
Net Weight:
200KG
Compliance:
CE Certified
Warranty:
Two Years limited warranty with lifetime support
Shipping Port:
Xiamen
Payment:
L/C D/A D/P T/T Western Union
Delivery Time:
5 days

WhatsApp : +86 18659217588
Email : David@tmaxcn.com
Email : Davidtmaxcn@gmail.com
Wechat : 18659217588

Product Details

10K RPM Spin Coater Supplier with Ultrasonic Spray - 5" Wafer Capacity & Optional PTFE Heating Cover

Lith-KJ5U is a benchtop spin coater supporting substrates up to 5" diameter with a maximum speed of 10,000 rpm, featuring a heat-resistant PTFE enclosure. The system includes dual ultrasonic spray nozzles and a temperature-controlled glass syringe for multifunctional operation, enabling either liquid atomization or heated solution dispensing. A precision DC servo motor drives the spin head with accurate speed/acceleration control, while vacuum chucking secures thin substrates. The intuitive interface combines a keyboard and LCD display for programming 12 customizable recipes with 6 segments each. All critical parameters (spin duration, speed, acceleration) are adjustable via the front panel. Corrosion-resistant construction ensures cleanroom compatibility.
Note: Compatible with glovebox operation under Ar atmosphere (requires external vacuum pump placement).

TECHNICAL SPECIFICATIONS

Category	Specifications
Key Features
Programmable rotation speed	500–10,000 RPM
PTFE chamber heating	Up to 200°C
Substrate compatibility	5 mm to 5" diameter
Integrated ultrasonic spray nozzles	Liquid atomization via gravity/low-pressure air
Temperature-controlled glass syringe	Max. 120°C (for heated solution deposition)
Gas inlet port	6 mm diameter (controlled atmosphere processing)
Safety interlock	Integrated into lid mechanism
Liquid Injection Methods
1. Ultrasonic Spray System	• Titanium alloy nozzles with adjustable power controller (for spray pyrolysis) • Cylindrical nozzle: ~2 cm spray diameter (concentrated pattern) • Cone nozzle: ~4 cm spray diameter (wide pattern)
2. Heated Dispensing	Glass syringe with digital PID temperature control (max. 120°C)
3. Standard Accessory	20 mL plastic syringe included
Coating Chamber
Material	PTFE (chemically resistant)
Chamber diameter	150 mm
Maximum temperature	200°C (≤10 minutes)
Vacuum chucks	PTFE (Ø40 mm and Ø10 mm, for 1"–4" wafers)
Vacuum System	120 L/min oilless pump, includes Ø8 mm plastic tubing
Programmable Controls
Program storage	12 programs (6 segments each) • Speed range: 500–10,000 RPM • Segment duration: ≤60 sec • Acceleration: 100–2,000 RPM/sec (adjustable)
Speed accuracy	±5%
Power Requirements
Input voltage	AC 220V (110V available upon request)
Total power	1,000 W (coater + pump)
Motor type	24V DC high-speed motor
Optional Accessories
PE heating cover	PID-controlled (max. 120°C)
UV LED curing system	365 nm wavelength
Glovebox feedthrough kit	For Ar environments
Plasma cleaner pre-treatment	Recommended for optimal coating adhesion