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Spin Coater

12,500 RPM High-Speed Spin Coater Device For 4" Wafers

  • Model Number:

    TMAX-KJ4P

  • Dimension(L*W*H):

    1000mm(W)X1000mm(D)X1650mm(H)

  • Net Weight:

    200KG

  • Compliance:

    CE Certified

  • Warranty:

    Two Years limited warranty with lifetime support

  • Shipping Port:

    Xiamen

  • Payment:

    L/C D/A D/P T/T Western Union

  • Delivery Time:

    5 days
Product Details

12,500 RPM High-Speed Spin Coater Device For 4" Wafers—Vacuum Chuck, PP Anti-Corrosion, Ar Compatible



The TMAX-KJ4P is a precision spin coater capable of reaching 12,500 rpm (13,000 rpm max for <60 sec) for substrates up to 5" diameter. It features a DC servo motor-driven spin head with programmable speed/acceleration control and vacuum chuck compatibility for thin substrates. The corrosion-resistant design is cleanroom- and glovebox-compatible (Ar gas environment supported). 


Key Specifications

Section

Parameter

Specification

Main Features

Spinning Speed

Programmable 500-12,500 RPM (13,000 RPM max for <60 sec)

 

Substrate Compatibility

10 mm to 5" (127 mm) diameter

 

Chamber Material

Anti-corrosive PP construction

 

Gas Inlet

6 mm port for inert gas purging

 

Safety

Integrated lid interlock

 

Glovebox Compatibility

Ar environment compatible (requires external vacuum pump)

Vacuum Chuck

Chamber Diameter

150 mm

 

Included Chucks

2 aluminum vacuum chucks (20-100 mm substrates)

Vacuum Pump (Optional)

Type

Compact oil-free pump

 

Glovebox Requirement

Must be placed outside glovebox

 

Feedthrough

Required for integration (sold separately)

Control Panel

Program Capacity

12 programs (6 segments each)

 

Speed Range

500-12,500 RPM programmable

 

Duration

0-999 sec per segment

 

Acceleration

100-2,000 RPM/sec adjustable

 

Speed Accuracy

<5% deviation

Input Power

Voltage

Selectable AC 110V/220V

 

Power Consumption

1,000 W total (coater + pump)

 

Motor

24V DC high-speed servo

Liquid Injection

Standard Package

20 mL plastic syringe with needle

 

Optional Accessories

1. Electronic pipette (20-200 µL)

2. Heatable glass syringe (to 200°C)

3. Heating cover (to 120°C)

Compliance

Certifications

CE, NRTL, CSA (electrical components)

 

Warranty Exclusions

Rust/damage from improper storage

spin coater price

 

Related Tags :

Anti-Corrosion Spin Coater Spin Coater Device 4" Wafer Spin Coater
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