Chemical-Resistant Vacuum Spin Coater Unit With 10K RPM, 5" Chuck , 200°C Heating/UV

Chemical-Resistant Vacuum Spin Coater Unit With 10K RPM, 5" Chuck , 200°C Heating/UV

Application
Designed for thin-film coating processes in semiconductor, crystal, optical disc, and printing plate industries. Compatible with highly acidic/alkaline coating solutions.

Key Features & Advantages

1. Sample Fixation:

Vacuum chuck adsorption (up to -0.08MPa) ensures secure sample placement.

Includes two interchangeable polypropylene chucks (Φ19mm & Φ60mm) for varied sample sizes.

Centering tool minimizes eccentricity-induced vibration or sample slippage.

2. Programmable Control:

Stores 12 programs, each with 6 customizable stages.

Speed gradient control: Ramp rates (100–2000 rpm) prevent material waste and ensure uniform film thickness.

LCD + PCB microcontroller interface for intuitive operation (full English OS).

3. Motor & Performance:

24V DC brushless motor: Low noise, high stability, and rapid acceleration (500–10,000 rpm ±1% accuracy).

Ensures consistent coating uniformity and repeatability.

4. Vacuum System:

Oil-free dual-piston pump: Compact, maintenance-free, and environmentally friendly (exhaust flow ≥70 L/min).

Supports inert gas (Ar/N₂) environment for sensitive materials.

5. Construction:

Chamber: Chemical-resistant polypropylene (excellent stress-cracking resistance).

Body: Lightweight cast aluminum for durability.

6. Safety:

Lid-protection: Auto-deceleration upon opening during operation.

Technical Specifications

Installation Requirements

· Environment: 0–45°C, 10–85% RH (non-condensing).

· Workspace: 800×600×700 mm bench (≥50 kg load capacity; cement recommended).

· Utilities:

o Single-phase grounded outlet (10A).

o Drain port for wastewater.

o No corrosive gases/vibrations nearby.

Standard Accessories

1. Vacuum chucks (Φ19mm & Φ60mm) with O-rings.

2. Centering tool (4 alignment pins).

3. Dropper +bracket.

4. Oil-free vacuum pump + rubber tube (clamped).

Optional Accessories

· Imported/domestic pipettes.

· Custom chuck sizes.