products categories

contact us

products
Sputter Coater for SEM Sample Preparation

Au/Pt/Pd/Ag Metal Sputtering Targets PVD Magnetron Sputtering Coating System

  • Model Number:

    TMAX-HZ-JS01
  • Input Power:

    2000W
  • Compliance:

    CE Certified
  • Warranty:

    One Year limited warranty with lifetime support
  • Shipping Port:

    Xiamen
  • MOQ:

    1
  • Payment:

    L/C D/A D/P T/T Western Union
  • Delivery Time:

    5 days
Product Details

Au/Pt/Pd/Ag Metal Sputtering Targets PVD Magnetron Sputtering Coating System

 

 

Model: TMAX-HZ-JS01-Au/Pt/Pd/Ag Metal Sputtering Targets


Product Overview

The TMAX-HZ-JS01 is a next-generation magnetron ion sputtering coater, independently developed and manufactured to set a new benchmark in sample preparation instruments. Featuring one-touch operation and a fully digitized human-machine interface, it delivers high-precision, nanoscale conductive coatings (≤5 nm) for SEM sample preparation, effectively addressing charging effects in non-conductive specimens.

Technical Specifications

Parameter

Specification

Model

TMAX-HZ-JS01

Dimensions

530 × 300 × 320 mm

Power Supply

100–250 VAC, 50/60 Hz

Sputtering Voltage

300–600 V (DC)

Sputtering Current

10–50 mA (±1 mA)

Sputtering Time

0–600 s (±1 s)

Working Vacuum

2–10 Pa (4–8 Pa optimal)

Ultimate Vacuum

<1 Pa

Target Size

Ø50 × 0.1 mm

Sample Stage

Ø65 mm (holds 12 standard stubs)

Vacuum Chamber

Ø120 × 100 mm (130 × 100 mm)*

Control Interface

5-inch touchscreen (ARM-based)

Vacuum Measurement

Piezoelectric Pirani gauge

Pump System

Rotary vane pump


Target Applications

· Material Science: Nanomaterials, thin films, composites.

· Biology & Medicine: Non-conductive tissues, polymers, membranes.

· Electronics: Electrode preparation, semiconductor analysis.

· High-Resolution SEM: Requires minimal grain size (≤5 nm) and low thermal impact.


Installation & Operation

1. Quick Start: Connect power/gas supply (Ar/N₂ optional), load samples, and press START.

2. Automated Workflow: Self-check, real-time monitoring, and auto-venting post-coating.

3. Maintenance: No specialized upkeep; tool-free target replacement (Au/Pt/Pd/Ag).

Au Targets Sputtering

Pt PVD Sputtering