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- If you have questions, please contact us, all questions will be answered
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Au/Pt/Pd/Ag Metal Sputtering Targets PVD Magnetron Sputtering Coating System
Model Number:
TMAX-HZ-JS01Input Power:
2000WCompliance:
CE CertifiedWarranty:
One Year limited warranty with lifetime supportShipping Port:
XiamenMOQ:
1Payment:
L/C D/A D/P T/T Western UnionDelivery Time:
5 days
- WhatsApp : +86 18659217588
- Email : David@tmaxcn.com
- Email : Davidtmaxcn@gmail.com
- Wechat : 18659217588
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Small Large-Target Magnetron Sputtering PVD Coater Equipment For TEM PreparationNext:
Cold Magnetron Sputtering Deposition System For Conductive Coating Of SEM Sample Preparation
Au/Pt/Pd/Ag Metal Sputtering Targets PVD Magnetron Sputtering Coating System
Model: TMAX-HZ-JS01-Au/Pt/Pd/Ag Metal Sputtering Targets
Product Overview
The TMAX-HZ-JS01 is a next-generation magnetron ion sputtering coater, independently developed and manufactured to set a new benchmark in sample preparation instruments. Featuring one-touch operation and a fully digitized human-machine interface, it delivers high-precision, nanoscale conductive coatings (≤5 nm) for SEM sample preparation, effectively addressing charging effects in non-conductive specimens.
Technical Specifications
Parameter |
Specification |
Model |
TMAX-HZ-JS01 |
Dimensions |
530 × 300 × 320 mm |
Power Supply |
100–250 VAC, 50/60 Hz |
Sputtering Voltage |
300–600 V (DC) |
Sputtering Current |
10–50 mA (±1 mA) |
Sputtering Time |
0–600 s (±1 s) |
Working Vacuum |
2–10 Pa (4–8 Pa optimal) |
Ultimate Vacuum |
<1 Pa |
Target Size |
Ø50 × 0.1 mm |
Sample Stage |
Ø65 mm (holds 12 standard stubs) |
Vacuum Chamber |
Ø120 × 100 mm (130 × 100 mm)* |
Control Interface |
5-inch touchscreen (ARM-based) |
Vacuum Measurement |
Piezoelectric Pirani gauge |
Pump System |
Rotary vane pump |
Target Applications
· Material Science: Nanomaterials, thin films, composites.
· Biology & Medicine: Non-conductive tissues, polymers, membranes.
· Electronics: Electrode preparation, semiconductor analysis.
· High-Resolution SEM: Requires minimal grain size (≤5 nm) and low thermal impact.
Installation & Operation
1. Quick Start: Connect power/gas supply (Ar/N₂ optional), load samples, and press START.
2. Automated Workflow: Self-check, real-time monitoring, and auto-venting post-coating.
3. Maintenance: No specialized upkeep; tool-free target replacement (Au/Pt/Pd/Ag).

