ru
products categories
- Battery Production Equipment Line
- Battery Lab Pilot Equipment Line
- Lithium Battery Pack Assembly Line
- Solid State Battery Assembly Line
- Sodium Ion Battery Production Line
- Supercapacitor Assembly Line
- Lithium Ion Battery Recycling Plant
- Dry Electrode Preparation Solution
- Perovskite Based Solar Cell Lab Line
- Li ion Battery Materials
- Cathode Active Materials
- Anode Active Materials
- Customized Battery Electrode
- Coin Cell Parts
- Lithium Chip
- Cylindrical Cell Parts
- Battery Current Collectors
- Battery Conductive Materials
- Electrolyte
- Metal Mesh
- Battery Binder
- Separator and Tape
- Aluminum Laminate Film
- Nickel Strip
- Battery Tabs
- Graphene Materials
- Nickel Felt
- Titanium Fiber Felt
- Battery
- Battery Pack Machine & Compoments
- Battery Pack Compoments
- Turnkey Solutions Battery Pack Assembly Line
- Cell Sorter
- Battery Pack Spot Welder
- Laser Welder
- Battery Charging Discharging Tester
- Battery Pack Aging Machine
- Battery Pack Comprehensive Tester
- CCD Visual Inspector
- Battery Pape Sticking Machine
- BMS Testing Machine
- Al Wire Bonding Machine
- Lithium Battery Machine
- Battery Tester & Analyzer
- Battery Safety Tester
- Material Characterization Tester
- Rolling Press Machine
- Spot Welding Machine
- Vacuum Mixer Machine
- Crimping/Disassembling Machine
- Vacuum Sealing Machine
- Electrolyte Filling
- Stacking/Winding Machine
- Electrode Cutter/Slitter
- Pouch Forming Machine
- NMP Solvent Treatment System
- Lithium Battery Production Plant
- Vacuum Glove Box
- Furnaces
- Coaters
- PVD Coater
- Laboratory Press Machine
- Large Press Machine
- Planetary Centrifugal Mixer
- Ball Mill
- Laboratory Machine
- Cutting Machine
- Metal Foam
contact us
- If you have questions, please contact us, all questions will be answered
- WhatsApp : +86 18659217588
- Email : David@tmaxcn.com
- Email : Davidtmaxcn@gmail.com
- Add : No. 39, Xinchang Road, Xinyang, Haicang Dist., Xiamen, Fujian, China (Mainland)
Benchtop PVD Systems Manufacturer For Metal, Oxide, Semiconductor Deposition
Model Number:
TMAX-PC-DZ04Input Power:
2000WCompliance:
CE CertifiedWarranty:
One Year limited warranty with lifetime supportShipping Port:
XiamenMOQ:
1Payment:
L/C D/A D/P T/T Western UnionDelivery Time:
5 days
- WhatsApp : +86 18659217588
- Email : David@tmaxcn.com
- Email : Davidtmaxcn@gmail.com
- Wechat : 18659217588
Previous:
Solar Cell Thin Film Evaporation Evaporator For Metals, Alloys & Dielectric DepositionNext:
Perovskite Vacuum Multilayer Organic Thin Film Evaporation Deposition System
Benchtop PVD Systems Manufacturer For Metal, Oxide, Semiconductor Deposition
TMAX-PC-DZ04-Electron Beam Evaporation Coating System
Applications
· Deposition of conductive, semiconductor, ferroelectric, and optical films
· Ideal for research labs, universities, and small-scale production
Key Advantages
✔ High-precision deposition with E-type electron gun for uniform coatings
✔ Dual evaporation modes (E-beam + optional resistive thermal evaporation)
✔ Rotating & heated substrate stage (up to 800°C) for improved film adhesion
✔ Fast vacuum recovery (<20 min to high vacuum) for efficient operation
✔ Quartz crystal monitoring for real-time thickness control (0–999.99 nm)
✔ Flexible configuration (4-pocket crucible, multi-material compatibility)
Technical Specifications
Category |
Parameter |
Value/Description |
Vacuum System |
Ultimate Vacuum |
≤6.7×10-4Pa |
|
Vacuum Recovery Time (1×10-1→5×10-4) |
≤20 min |
|
Leak Rate |
≤6.7×10-7 Pa·L/s |
Vacuum Chamber |
Dimensions |
500 × 500 × 600 mm (U-shaped, front-opening) |
E-Gun Evaporation |
Anode Voltage |
6 kV / 8 kV (1 set) |
|
Crucible |
Water-cooled, 4-pocket (11 mL each) |
|
Power Range |
0–6 kW (adjustable) |
Resistive Evaporation (Optional) |
Voltage |
5 V / 10 V |
|
Max Current/Power |
300 A / 3 kW (1 set) |
|
Electrodes |
3 water-cooled (configurable for 2 boats) |
Substrate Handling |
Max Substrate Size |
4″ (100 mm) |
|
Rotation Speed |
5–60 RPM |
|
Source-to-Substrate Distance |
300–350 mm |
|
Heating Temperature |
Up to 800°C (±1°C) |
Control & Monitoring |
Shutter |
Manual (1 set) |
|
Gas Flow Control |
1-channel MFC |
|
Thickness Monitor (QCM) |
0–99,999 Å (0–999.99 nm) |
Recommended Use Cases
· Semiconductor research (dielectric layers, conductive films)
· Optical coatings (anti-reflective, filters, mirrors)
· Advanced materials (ferroelectrics, superconductors, 2D materials)
· Prototype development for thin-film devices
Why Choose this?
· Reliable performance for high-purity film growth.
· Modular design supports diverse materials and processes.
· User-friendly controls for both manual and precision deposition.
+86 13174506016
David@tmaxcn.com
