High-Vacuum Dual-Target Magnetron Ion Sputtering Coating System Coater

High-Vacuum Dual-Target Magnetron Ion Sputtering Coating System Coater     Model: TMAX-HZ-JS04- High-Vacuum Dual-Target Sputtering Coater Technical Parameters Category Specification Model TMAX-HZ-JS04 Vacuum System Oil-free diaphragm pump + molecular pump Ultimate Vacuum ≤1.0×10⁻⁴ Pa Pressure Measurement Full-range cold cathode gauge + front-end Pirani gauge Gas Control MFC (Mass Flow Controller) for Ar/O₂/N₂ Target Configuration Dual targets (independent control, alternate/synchronous sputtering) Target Compatibility Metals, alloys, compounds (custom sizes available) Optional Feature Real-time thickness monitoring (nanometer precision) Cooling System Energy-efficient target cooling Safety Protections Overpressure/overcurrent/overheat protection, vacuum interlock, emergency vent Key Features 1. Dual-Target Flexibility ·Enables multi-material deposition (e.g., bilayers, graded films, or interfaces) in a single run. 2. High-Vacuum Precision ·Ultra-low base pressure (≤1.0×10⁻⁴ Pa) minimizes contamination for high-purity films. 3. Intelligent Process Control ·MFC-regulated gas flow ensures repeatable reactive sputtering (e.g., oxides/nitrides). 4. User-Optimized Design ·Energy-saving pumps and cooling reduce operational costs without compromising performance. Typical Applications · Semiconductors: Electrode/metallization layers, barrier films. · Optics: Anti-reflective, conductive, or hard coatings. · Energy: Thin-film batteries, solar cell layers. · Research: Nanomaterials, heterostructures, surface engineering. Why Choose? · Lab to Production: Scalable for both R&D prototyping and industrial batch processing. · Safety & Reliability: Automated safeguards protect equipment and users. · Customizable: Adaptable to diverse materials and film architectures.       html {margin:0;padding:0;} body {margin:0;padding:5px;} body, td {font:12px/1.5 "sans serif",tahoma,verdana,helvetica;} body, p, div {word-wrap: break-word;} p {margin:5px 0;} table {border-collapse:collapse;} img {border:0;} noscript {display:none;} table.ke-zeroborder td {border:1px dotted #AAA;} img.ke-flash { border:1px solid #AAA; background-image:url(https://www.lithmachine.com/js/htmledit/kindeditor/themes/common/flash.gif); background-position:center center; background-repeat:no-repeat; width:100px; height:100px; } img.ke-rm { border:1px solid #AAA; background-image:url(https://www.lithmachine.com/js/htmledit/kindeditor/themes/common/rm.gif); background-position:center center; background-repeat:no-repeat; width:100px; height:100px; 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