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Magnetron Sputter Depostion Coater Machine PVD System For SEM
Magnetron Sputter Depostion Coater Machine PVD System For SEM Model: TMAX-HZ-JS03- Au/Carbon Coating Magnetron Sputter Coater Product Overview The TMAX-HZ-JS03 Dual-Target Magnetron Ion Sputtering Coater, independently developed with cutting-edge technology, sets a new benchmark for sample preparation instruments. It integrates dual-target co-sputtering and multi-layer single-sputtering capabilities, featuring a standard rotating/tilting module for multi-angle, uniform film coverage. This design eliminates charging effects, enhances sample contrast, and delivers high-resolution, true-to-life morphological characterization—ideal for advanced material science and biological research. Technical Specifications Category Parameter Specification Core Parameters Model TMAX-HZ-JS03 Vacuum Chamber (mm) 160 × 120 Sputtering Voltage 300–700 V Sample Stage (mm) Adjustable 80–100 diameter Sputtering Type Magnetron Working Vacuum 2–10 Pa System Configuration Power Supply 100–250 VAC, 50/60 Hz Target Size (mm) φ50 × 0.1 Control System 5" Touchscreen (ARM) Max. Power Consumption 100 W Process Control Sputtering Current 10–50 mA (±1 mA) Sputtering Time 0–600 s (±1 s) Ultimate Vacuum <1 Pa Safety & Monitoring Vacuum Measurement Digital Pirani Gauge Protection Current/Vacuum interlock Instrument Highlights 1. SEM-Optimized Coating Performance · Dual-target configuration: Enables sequential Au/Pt and Carbon deposition without breaking vacuum · 2-10Pa working vacuum: Specialized for minimum oxidation during conductive coating · <5nm particle size: Finer than conventional sputter coaters (typically 10-20nm) 2. Intelligent Process Control · 300-700V voltage range with 1mA precision – 30% wider than standard systems for optimal film density · Real-time plasma monitoring prevents arcing on sensitive samples 3. Ergonomic Design · 160mm large chamber: Accommodates tall SEM stubs (up to 25mm) and irregular specimens · Tool-free target change Target Applications ▸ Life Science: Coating for pollen, plant tissues, and hydrated biological samples ▸ Materials Research: Nanowires, polymer films, and porous materials ▸ Failure Analysis: PCB cross-sections and insulating components Operational Advantages · One-cycle coating: 12 samples/batch (50% more than competitors) · Zero thermal damage: Magnetron confinement keeps samples <40°C · Self-diagnostics: Automatic pump protection and target life counter html {margin:0;padding:0;} body {margin:0;padding:5px;} body, td {font:12px/1.5 "sans serif",tahoma,verdana,helvetica;} body, p, div {word-wrap: break-word;} p {margin:5px 0;} table {border-collapse:collapse;} img {border:0;} noscript {display:none;} table.ke-zeroborder td {border:1px dotted #AAA;} img.ke-flash { border:1px solid #AAA; background-image:url(https://www.lithmachine.com/js/htmledit/kindeditor/themes/common/flash.gif); 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