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contact us
- If you have questions, please contact us, all questions will be answered
- WhatsApp : +86 18659217588
- Email : David@tmaxcn.com
- Email : Davidtmaxcn@gmail.com
- Add : No. 39, Xinchang Road, Xinyang, Haicang Dist., Xiamen, Fujian, China (Mainland)
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Multi-Material Deposition Magnetron Sputter Coating System Equipment For Organic Multilayer
Multi-Material Deposition Magnetron Sputter Coating System Equipment For Organic Multilayer Model: TMAX-PC-JS11 – Product Specifications Specifications Category Parameter Details Vacuum Performance Ultimate Vacuum (Sputtering Chamber) ≤6.6×10⁻⁶ Pa System Leak Rate ≤5.0×10⁻⁷ Pa·L/S Pump-Down Time (Atmosphere → 6.6×10⁻⁴ Pa) ≤30 min Vacuum Retention (After 12 Hours Shutdown) ≤5 Pa Sputtering Chamber Structure Vertical, top-opening, stainless steel (argon-welded, electropolished) Dimensions ≥Ø300 mm × 300 mm (with anti-contamination liner) Bakeability & Sealing 100–150°C; metal gasket/fluororubber O-ring Magnetron Sputtering Target Configuration 3 × 50 mm adjustable-angle permanent magnet targets (RF/DC/MF compatible) Power Supply 2 × DC (≥500 W), 1 × auto-matching RF (≥500 W) Film Uniformity ≤5% deviation Additional Features 3 × SMC rotary shutters; magnetic material support Substrate Stage Sample Capacity 1 × ≥100 mm diameter Rotation Speed 0–30 RPM (adjustable) Heating Range RT–500°C (PID-controlled, thermocouple feedback) Gas Delivery Mass Flow Control 2 paths (100 SCCM + 20 SCCM MFCs, CF16 valves) Auxiliary Gas Lines 2 × DN16 inlet valves Pumping System High-Vacuum Pump Pfeiffer Hipace 700 (680 L/s) + 4 L/s rotary pump Valves & Pipeline DN40/CC150 pneumatic valves, stainless steel bellows Control & Safety Automation PLC + industrial PC + touchscreen (real-time monitoring/logging) Protection Interlocks for water/power faults (overcurrent, open circuit, etc.) Additional Components Frame Steel construction, lockable casters, removable panels Included Accessories Chiller, silent compressor, tool kit, spare parts Measurement Vacuum Gauge INFICON combination gauge Key Advantages & Applications Advantages: · High Precision: Ultra-high vacuum (UHV) capability ensures contamination-free thin-film deposition. · Flexibility: Multi-target configuration with adjustable parameters for diverse materials (including magnetic films). · Reliability: Robust PLC automation with fail-safe interlocks and real-time diagnostics. · User-Friendly: Integrated touchscreen and PC control streamline operation. Target Applications: · Research & Development: Ideal for academic or industrial labs studying advanced coatings (e.g., semiconductors, optics). · Industrial Coating: Suitable for small-scale production of functional films (wear-resistant, conductive, or decorative layers). · Material Science: Supports experiments requiring controlled environments (e.g., reactive sputtering, multi-layer deposition). html {margin:0;padding:0;} body {margin:0;padding:5px;} body, td {font:12px/1.5 "sans serif",tahoma,verdana,helvetica;} body, p, div {word-wrap: break-word;} p {margin:5px 0;} table {border-collapse:collapse;} img {border:0;} noscript {display:none;} table.ke-zeroborder td {border:1px dotted #AAA;} img.ke-flash { border:1px solid #AAA; background-image:url(https://www.lithmachine.com/js/htmledit/kindeditor/themes/common/flash.gif); background-position:center center; background-repeat:no-repeat; width:100px; height:100px; } img.ke-rm { border:1px solid #AAA; background-image:url(https://www.lithmachine.com/js/htmledit/kindeditor/themes/common/rm.gif); 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