Multi-Material Evaporation Deposition Coating System Machine For OLED, Solar Cell & Semiconductor

 

TMAX-TK-ZD02-High-Vacuum Multi-Material Evaporation

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Technical Specifications

Category	Parameter	Specification
Basic Configuration	Model	TMAX-TK-ZD02
	Coating Method	Multi-source evaporation deposition
	Chamber Structure	Vertical square, front-opening design
Vacuum System	Chamber Dimensions	Ø400mm × H500mm (Material: 304 stainless steel)
	Ultimate Vacuum	≤6.0×10⁻⁴ Pa
	Pump-down Time	≤45 min (Atmosphere→10⁻⁴ Pa)
	Pump Configuration	Compound molecular pump (FF-200/1200, 1200L/s) + Rotary vane pump (TRP-36, 9L/s)
	Vacuum Valves	GDQ-200 main valve + GDQ-40 bypass valve
Deposition Control	Heating Temperature	Room temperature ~ 300°C
	Substrate Holder	120mm×120mm (Custom sizes available)
	Film Uniformity	≤±5.0%
	Evaporation Sources	3 groups (Boat-type + Filament-type for metals) with baffles
	Thickness Control	Quartz crystal monitor (Optional, 1 water-cooled probe)
Operational	Control System	PLC + Touchscreen
	Safety Protection	Water shortage/Overcurrent/Voltage fault alarms
	Power Requirement	≥8kW
	Dimensions	1710mm(L)×850mm(W)×1850mm(H)

Standard configuration: Manual button control. Quartz crystal monitor available as optional accessory.

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Key Features & Applications

◉ Modular Design

· Integrated vacuum chamber with automated welding and surface treatment

· Hybrid sealing (metal + fluororubber) for optimal vacuum maintenance

◉ Process Flexibility

· Simultaneous evaporation of metals (Al, Ag, Au, etc.) and organic materials

· Adjustable baffles for deposition uniformity control

◉ User-Oriented

· Explicit "Optional" labeling for thickness monitoring system

· Customizable substrate holders for specialized research needs

◉ Target Applications

    Novel thin-film material development

    Optoelectronic device research (OLED, thin-film solar cells)

    Small-batch functional coating production

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Advantages

Parameter		Entry-Lab Systems	Industrial Systems
Evaporation Sources	3 independent (metal/organic hybrid)	1-2 single-type sources	4-6 (customized)
Thickness Control	±5.0% (upgradable to ±2.0%)	±8-10% (no real-time monitoring)	±1-3% (multi-probe standard)
Heating Rate	10°C/min (RT→300°C)	≤5°C/min	15-20°C/min (high-temp)
Leak Rate	≤5×10⁻⁹ Pa·m³/s (metal seals)	≤1×10⁻⁷ Pa·m³/s (rubber seals)	≤1×10⁻¹⁰ Pa·m³/s
Maintenance Cycle	500hrs (turbo pump)	300hrs	1000hrs (mag-lev pumps)
Coating Area	144cm² (expandable to 400cm²)	50-100cm²	1000cm²+

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Ideal for:

✓ Bridging lab-scale R&D and production verification

✓ Cross-disciplinary material research teams

✓ Budget-conscious innovators demanding industrial-grade performance