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- If you have questions, please contact us, all questions will be answered
- WhatsApp : +86 18659217588
- Email : David@tmaxcn.com
- Email : Davidtmaxcn@gmail.com
- Add : No. 39, Xinchang Road, Xinyang, Haicang Dist., Xiamen, Fujian, China (Mainland)
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Electron-beam Metal Thermal Evaporator Coating System For Nano Film Fabrication
Electron-beam Metal Thermal Evaporator Coating System For Nano Film Fabrication TMAX-TK-DZ01-Precision Thin-Film Deposition Solution for Research & Industry Technical Specifications Parameter Specification Chamber Dimensions Φ600mm × 750mm (Water-cooled stainless steel) Base Pressure ≤5.0×10⁻⁵ Pa (after 24h baking) Pumping Speed ≤40 min (air → 5×10⁻⁴ Pa) Leak Rate ≤0.8 Pa/h Substrate Capacity Flat (Φ350mm) or Spherical (optional) Heating Temperature Up to 300°C (±1°C) Rotation Speed 0-20 rpm (with bias voltage) E-Gun Power 10kW (6-pocket crucible) Resistance Sources 2 sets (3000W total) Film Uniformity ≤±5% Key System Advantages 1. Superior Thin Film Quality ·Ultra-high vacuum environment (<5×10⁻⁵ Pa) minimizes contamination ·Optional ion-assisted deposition enhances film density and adhesion ·Excellent thickness uniformity (±5%) for precision applications 2. Enhanced Process Capabilities ·Dual evaporation sources (E-beam + thermal) for material flexibility ·Heated rotating substrate stage (300°C) for uniform deposition ·Modular design allows future upgrades (optical monitoring, automation) 3. User-Friendly Operation ·Intuitive PLC+touchscreen control interface ·Comprehensive safety interlocks (cooling, vacuum, power) ·Compact footprint (2.5m×1.6m) optimized for lab spaces Primary Application Areas Optical Coatings • Anti-reflection coatings • Laser mirrors and filters • IR optical components Electronic & Semiconductor Films • Transparent conductors (ITO, AZO) • Dielectric layers (SiO₂, Al₂O₃) • Semiconductor device fabrication Functional Material Research • Ferroelectric films (PZT, BST) • Magnetic thin films • 2D material encapsulation Ideal For: ✓ Academic research laboratories ✓ Industrial R&D centers ✓ Small-scale precision coating production ✓ Advanced material development projects html {margin:0;padding:0;} body {margin:0;padding:5px;} body, td {font:12px/1.5 "sans serif",tahoma,verdana,helvetica;} body, p, div {word-wrap: break-word;} p {margin:5px 0;} table {border-collapse:collapse;} img {border:0;} noscript {display:none;} table.ke-zeroborder td {border:1px dotted #AAA;} img.ke-flash { border:1px solid #AAA; 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