Multi-target Magnetron Sputtering Machine For Parylene,OLED, Solar Cell & Semiconductor

Multi-target Magnetron Sputtering Machine For Parylene,OLED, Solar Cell & Semiconductor     Model: TMAX-PC-JS10-Multi-target, Multi-film Deposition Specifications Category Parameter Primary Application Nanoscale monolayer/multilayer films (hard coatings, metals, semiconductors, dielectrics) Target Users Universities, research institutes (R&D and small-batch production) System Composition Vacuum chamber, sputtering targets, sample stage, vacuum pumps, gas delivery, control systems, film thickness monitor, and auxiliary components Vacuum Performance Parameter Specification Ultimate Vacuum 6.7 × 10-5 Pa System Leak Rate ≤1 × 10-7 Pa·L/s Vacuum Recovery Time ≤40 min (to 6.6 × 10-1 Pa after N2 purge) Chamber & Sample Stage Component Specification Chamber Dimensions Ø630 mm × 350 mm (cylindrical) Sample Capacity 8 × 4-inch substrates (1 mm thickness) Sputtering Targets Feature Specification Target Types 3 × Permanent magnet targets, 3 × High-intensity magnet targets Cooling Method Indirect water-cooled (brazed structure) Target Diameter Ø100 mm Target-Substrate Distance 50–90 mm (manual adjustment, with position indicator) Sputtering Mode Vertical downward sputtering Substrate Control Parameter Specification Bias Voltage Up to -200 V Rotation Mechanism Computer-controlled revolution + rotation (stepper motor-driven) Temperature Control RT to 300°C (single calibration required; 3 heaters, one active at a time) Gas & Thickness Control Component Specification Mass Flow Controllers (MFC) 2 channels Film Thickness Monitor Quartz crystal microbalance (0–999,999 Å) Pumping Options Configuration Components Standard Turbo molecular pump + dry scroll pump Alternative Cryogenic pump + dry scroll pump Computer Control Features · Real-time displacement/speed monitoring with error calculation. · Linear/logarithmic display modes for speed vs. displacement. · Site-specific deposition via precision positioning. Key Advantages & Applications ✔ Multi-Target Flexibility – Supports diverse materials (metals, oxides, nitrides). ✔ Uniform Deposition – Computer-controlled rotation ensures film consistency. ✔ High Vacuum Stability – Minimizes contamination for high-purity films. ✔ Research-Ready – Modular design suits optoelectronics, tribological coatings, and semiconductor R&D. Ideal for: Advanced material science studies and prototyping of functional thin-film devices.       html {margin:0;padding:0;} body {margin:0;padding:5px;} body, td {font:12px/1.5 "sans serif",tahoma,verdana,helvetica;} body, p, div {word-wrap: break-word;} p {margin:5px 0;} table {border-collapse:collapse;} img {border:0;} noscript {display:none;} table.ke-zeroborder td {border:1px dotted #AAA;} img.ke-flash { border:1px solid #AAA; background-image:url(https://www.lithmachine.com/js/htmledit/kindeditor/themes/common/flash.gif); background-position:center center; background-repeat:no-repeat; width:100px; height:100px; } img.ke-rm { border:1px solid #AAA; background-image:url(https://www.lithmachine.com/js/htmledit/kindeditor/themes/common/rm.gif); background-position:center center; background-repeat:no-repeat; width:100px; height:100px; } img.ke-media { border:1px solid #AAA; background-image:url(https://www.lithmachine.com/js/htmledit/kindeditor/themes/common/media.gif); background-position:center center; 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