Film Deposition System For Perovskite Solar Cells, OLEDs,OPVs

Film Deposition System For Perovskite Solar Cells, OLEDs,OPVs      TMAX-PD-DZ01-Advanced Thin-Film Deposition System Product Overview The TMAX-PD-DZ01 is a high-performance vacuum deposition system designed for perovskite solar cells, OLEDs, lithium batteries, quantum dot LEDs (QLEDs), and organic photovoltaics (OPVs). Supporting thermal evaporation (resistive & e-beam) and organic vapor deposition, it enables the coating of metals (Au, Ag, Ti, Cr, Mo), oxides (SiO₂, ITO, AZO, NiO), and organic semiconductors in a fully inert glovebox-integrated environment. Key Features & Competitive Advantages 1. Space-Optimized Glovebox Integration ✔ Dual-Rail Sliding Door – Reduces glovebox space usage by >30% vs. conventional swing-door systems. ✔ Compact External Footprint – No extra lab space required beyond the glovebox. 2. Intelligent Control & Safety ✔ Siemens PLC + Touchscreen HMI – Enables manual/auto switching, remote PC control, and real-time process monitoring. ✔ Multi-Stage Interlock Protection – Prevents operator errors (e.g., venting under high vacuum). ✔ Leak & Overheat Alarms – Auto-shutdown safeguards sensitive samples. 3. Superior Thin-Film Performance ✔ Ultra-High Vacuum (UHV) Base Pressure – <3×10⁻⁵ Pa minimizes contamination for high-purity films. ✔ Industry-Leading Uniformity (±3%) – Enabled by planetary rotation (5–30 RPM) + adjustable dome height. ✔ Ion-Assisted Deposition (Optional) – Enhances adhesion density by >20% for metal/oxide layers. 4. Modular Source Configuration ✔ Multi-Source Compatibility – Simultaneously supports: · 8–10 kW E-beam (4–8 crucible positions) · 4 Resistive Sources (Max. 1500°C) · 2 Organic Vapor Cells (Precision temp. control ±1°C) ✔ Rapid Material Switching – Crucible turret reduces downtime by >50% vs. single-source systems. Detailed Technical Specifications Parameter Specification Performance Impact Chamber Dimensions 500×500×600 mm (Standard) / 600×650×800 mm (Large) Fits wafer-scale (200×200 mm) substrates; customizable for roll-to-roll R&D. Base Vacuum ≤3×10⁻⁵ Pa Critical for oxide & organic film purity; outperforms competitors (typical 5×10⁻⁵ Pa). Holding Pressure ≤8×10⁻⁴ Pa (30 min pump-down) / ≤5 Pa (12 hrs) Ensures long-duration process stability for tandem device fabrication. Deposition Rate 0.1–10 Å/s (e-beam) / 0.5–5 Å/s (resistive) Wide range supports ultrathin barriers (<10 nm) to thick electrodes (>500 nm). Substrate Heating RT–600°C (Optional) Enables in-situ annealing for perovskite crystallization or metal-oxide doping. Thickness Control Quartz crystal monitor (±0.1 nm) + optical feedback ±3% uniformity across 200 mm wafers; repeatable batch-to-batch results. Application-Specific Benefits ▶ Perovskite Solar Cells (PSCs) · All-in-One Processing – From ITO/SnO₂ ETL to Au/Ag electrodes, all in O₂/H₂O-free conditions. · Co-Evaporation Capability – Precisely tune FA/MA/Cs perovskite stoichiometry via multi-source control. ▶ OLED/QLED Displays · Organic-Metal Hybrid Deposition – Seamlessly switch between Alq3 emissive layers and Al cathodes. · Shadow Mask Compatibility – ≤200 mm substrates enable RGB pixel patterning. ▶ Solid-State Batteries · Lithium Anode Protection – Deposit LiPON/Li₃PS₄ solid electrolytes without air exposure. · High-Rate Metal Evaporation – >1 μm/min Ag current collectors for fast prototyping. ▶ Academic & Industrial R&D · Glovebox Coupling – Direct transfer to spin-coating/characterization modules (e.g., IV/CV testing). · Future-Proof Upgrades – Add sputtering/PECVD via flange ports. html {margin:0;padding:0;} body {margin:0;padding:5px;} body, td {font:12px/1.5 "sans serif",tahoma,verdana,helvetica;} body, p, div {word-wrap: break-word;} p {margin:5px 0;} table {border-collapse:collapse;} img {border:0;} noscript {display:none;} table.ke-zeroborder td {border:1px dotted #AAA;} img.ke-flash { border:1px solid #AAA; 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