Solid State Battery Multilayer PVD System For Composite Film Fabrication Deposition

Solid State Battery Multilayer PVD System For Composite Film Fabrication Deposition 

TMAX-PC-DZ01 Electron Beam Evaporation Coating System

Primary Applications

The TMAX-PC-DZ01 is designed for the deposition of conductive films, semiconductor films, ferroelectric films, and optical coatings, making it ideal for research institutions, universities, and small-batch production. Its high precision and versatility allow for advanced material studies and thin-film applications in optoelectronics, microelectronics, and nanotechnology.

System Composition

The system consists of:

· Evaporation Chamber: U-shaped design (500×600×500 mm) with front-loading access and rear-mounted pumping system.

· E-Gun (Electron Beam Evaporator): High-power electron gun for uniform and high-purity film deposition.

· Thermal Evaporation Electrodes: Supports alternative resistive evaporation (optional).

· Rotating Substrate Heater: Ensures uniform coating with adjustable rotation (5-60 rpm).

· Gas Supply System: Equipped with mass flow controllers for reactive or inert gas deposition.

· Vacuum System: High-efficiency pumping system for rapid evacuation.

· Control System: Automated and manual controls for precise operation.

Key Technical Specifications

Advantages & Features

✔ High Film Uniformity: Rotating substrate holder ensures even deposition.
✔ Precise Thickness Control: Quartz crystal monitor allows real-time monitoring (0–99,999 Å).
✔ Multi-Material Deposition: Supports e-beam evaporation (metals, oxides) and resistive evaporation (low-melting-point materials).
✔ High-Temperature Stability: Substrate heating up to 600°C (±1°C) for improved film adhesion and crystallinity.
✔ Efficient Vacuum System: Fast pump-down and ultra-low leak rate for high-purity deposition.

Ideal for

· Academic Research: Thin-film studies in physics, materials science, and engineering.

· Semiconductor & Optoelectronic R&D: Fabrication of sensors, solar cells, and optical coatings.

· Small-Scale Production: Prototyping and specialized coating applications.

This system is a cost-effective, high-performance solution for laboratories requiring reliable, repeatable thin-film deposition.