Small Large-Target Magnetron Sputtering PVD Coater Equipment For TEM Preparation

Small Large-Target Magnetron Sputtering PVD Coater Equipment For TEM Preparation     Model:  TMAX-HZ-JS02-Low-Temperature SEM Preparation Key Features & Applications The  TMAX-HZ-JS02 Magnetron Sputtering System integrates advanced vacuum technology with intelligent automation, delivering high uniformity, efficiency, and versatility for precision thin-film deposition. Its large-target design and planar magnetron cathode minimize plasma-induced thermal damage, making it ideal for temperature-sensitive samples (e.g., polymers, fibers, biological specimens) and high-resolution SEM preparation. Technical Parameters Category Specifications Dimensions 530 × 300 × 320 mm Input Voltage 100–250 VAC, 50/60 Hz Sputtering Voltage 300–600 V (DC) Target Material Ø50 × 0.1 mm (Au, Pt, Ag, Pd, etc.) Control Mode 5-inch touchscreen (ARM architecture, bilingual UI) Power Consumption 100 W Sputtering Current 10–50 mA (1 mA precision) Sputtering Time 0–600 s (1 s step) Working Vacuum 2–10 Pa (0.1 Pa resolution) Ultimate Vacuum <1 Pa Vacuum Measurement Full-range Pirani gauge Chamber Size Ø160 × 120 mm Sample Stage Ø80–100 mm (holds 12 standard stubs) Protections Overcurrent, vacuum safety System Components 1. Sputtering Source: Planar magnetron cathode for Au/Pt/Pd/Ag deposition. 2. Power Supply: Constant-current DC (300–600 V, ±1 mA precision). 3. Vacuum System: Rotary vane pump (<1 Pa), Pirani monitoring. 4. Automation: One-touch operation with parameter memory. 5. Data Display: Real-time curves for current, voltage, and vacuum status. Advantages · Nano-scale Coating: Particle size <5 nm, ideal for high-resolution SEM. · Low Thermal Impact: Magnetron technology reduces sample heating. · High Throughput: 12-sample capacity with auto-rotation for uniformity. · Plug-and-Play: No specialized training required. Ideal for: Material science, biology, and conductive/thermal enhancement of non-metallic samples. Operation Notes · Target Replacement: Tool-free design with shielded ring mechanism. · Maintenance: Oil-lubricated pump (included) with visual oil-level window. · Gas Connection: Supports Ar/N₂ or ambient air (6 mm OD tubing).       html {margin:0;padding:0;} body {margin:0;padding:5px;} body, td {font:12px/1.5 "sans serif",tahoma,verdana,helvetica;} body, p, div {word-wrap: break-word;} p {margin:5px 0;} table {border-collapse:collapse;} img {border:0;} noscript {display:none;} table.ke-zeroborder td {border:1px dotted #AAA;} img.ke-flash { border:1px solid #AAA; background-image:url(https://www.lithmachine.com/js/htmledit/kindeditor/themes/common/flash.gif); background-position:center center; background-repeat:no-repeat; width:100px; height:100px; } img.ke-rm { border:1px solid #AAA; background-image:url(https://www.lithmachine.com/js/htmledit/kindeditor/themes/common/rm.gif); background-position:center center; background-repeat:no-repeat; width:100px; height:100px; } img.ke-media { border:1px solid #AAA; 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