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- Add : No. 39, Xinchang Road, Xinyang, Haicang Dist., Xiamen, Fujian, China (Mainland)
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Lab Physical Vapor Deposition Coating Equipment Thin Film Evaporator
Lab Physical Vapor Deposition Coating Equipment Thin Film Evaporator TMAX-PD-ZD03-Thin Film Evaporator Product Overview The TMAX-PD-ZD03 system adopts an oil-free high-vacuum system with a large pumping-speed molecular pump, featuring an integrated electromechanical design for minimal lab space occupancy. It supports compatible metal and organic evaporation sources, offering high cost-effectiveness and user-friendly operation. Ideal for research institutes, electrode deposition, SEM sample preparation, and studies in OLED/solar cell technologies. Key Features 1. Broad Application Scope Optimized for evaporating noble metals (e.g., Au, Ag) in electrode preparation and semiconductor lift-off processes, reducing material waste. 2. Space-Saving & Durable Compact footprint (550×900 mm) with a full stainless-steel vacuum chamber for enhanced durability and safety. 3. High-Efficiency Vacuum System Oil-free molecular pump (≥300 L/s pumping speed) allows flexible installation angles, shortened pumping paths, and faster processing. 4. Multi-Source Compatibility Configurable with 2–4 evaporation sources (metal/organic), supporting co-evaporation or sequential deposition. 5. Precision Control Constant-current evaporation power supply, in-situ thickness monitoring, and excellent film uniformity (±3–5%) with high repeatability. 6. Upgradability Optional non-stop venting and full automation control. Technical Specifications Core Parameters Category Specification Chamber Dimensions (L×W×H) 300 × 300 × 450 mm (customizable height) System Dimensions (L×W×H) 530 × 750 × 1800 mm (standard) / 1100 × 750 × 1500 mm (alternative) Ultimate Vacuum ≤5×10−5 Pa Base Pressure Holding ≤5 Pa (12 hrs), ≤8×10−4 Pa (30 min) Substrate Stage ≤100 × 100 mm (max. 110 mm substrate or 25×15 mm ITO glass) Source-Substrate Distance >300 mm Evaporation Sources · Metal Sources: 2–3 groups (optional) · Organic Sources: Beam-source furnace type, temperature-controlled (0–500°C), integrated adjustable baffle (0–15°), 2–3 groups (optional). Power Requirements · Voltage: AC 220 V/50 Hz (380 V optional) · Power: ≤6 kW Target Applications · Research & Academia: Electrode deposition, SEM/TEM sample preparation. · Advanced Materials: OLED encapsulation, perovskite solar cell R&D. · Semiconductor: Metal lift-off processes, thin-film device fabrication. Why Choose? · Cost-Effective: Reduced material consumption and energy-efficient operation. · User-Centric: Simplified controls, robust safety features, and modular upgrades. · Future-Ready: Adaptable to evolving lab needs with optional automation. html {margin:0;padding:0;} body {margin:0;padding:5px;} body, td {font:12px/1.5 "sans serif",tahoma,verdana,helvetica;} body, p, div {word-wrap: break-word;} p {margin:5px 0;} table {border-collapse:collapse;} img {border:0;} noscript {display:none;} table.ke-zeroborder td {border:1px dotted #AAA;} img.ke-flash { border:1px solid #AAA; background-image:url(https://www.lithmachine.com/js/htmledit/kindeditor/themes/common/flash.gif); background-position:center center; background-repeat:no-repeat; width:100px; height:100px; } img.ke-rm { border:1px solid #AAA; background-image:url(https://www.lithmachine.com/js/htmledit/kindeditor/themes/common/rm.gif); background-position:center center; background-repeat:no-repeat; width:100px; height:100px; } img.ke-media { border:1px solid #AAA; 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background-image:url(https://www.lithmachine.com/js/htmledit/kindeditor/themes/common/flash.gif); background-position:center center; background-repeat:no-repeat; width:100px; height:100px; } img.ke-rm { border:1px solid #AAA; background-image:url(https://www.lithmachine.com/js/htmledit/kindeditor/themes/common/rm.gif); background-position:center center; background-repeat:no-repeat; width:100px; height:100px; } img.ke-media { border:1px solid #AAA; background-image:url(https://www.lithmachine.com/js/htmledit/kindeditor/themes/common/media.gif); background-position:center center; background-repeat:no-repeat; width:100px; height:100px; } img.ke-anchor { border:1px dashed #666; width:16px; height:16px; } .ke-script, .ke-noscript, .ke-display-none { display:none; font-size:0; width:0; height:0; } .ke-pagebreak { border:1px dotted #AAA; font-size:0; height:2px; } html {margin:0;padding:0;} body {margin:0;padding:5px;} body, td {font:12px/1.5 "sans serif",tahoma,verdana,helvetica;} body, p, div {word-wrap: break-word;} p {margin:5px 0;} table {border-collapse:collapse;} img {border:0;} noscript {display:none;} table.ke-zeroborder td {border:1px dotted #AAA;} img.ke-flash { border:1px solid #AAA; 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