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- WhatsApp : +86 18659217588
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- Add : No. 39, Xinchang Road, Xinyang, Haicang Dist., Xiamen, Fujian, China (Mainland)
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High Vacuum Benchtop Magnetron Co-sputtering System Equipment
High Vacuum Benchtop Magnetron Co-sputtering System Equipment TMAX-BY-JS04-Various weakly magnetic targets Specification Category Specification Target Material Various weakly magnetic targets Target Size Ø60-80mm (weakly magnetic targets) Control Mode Manual operation Chamber Borosilicate glass, Ø180mm × H240mm Sample Stage Ø180mm (compatible with Ø80mm stage) Sputtering Gas Supports multiple gases (e.g., Ar) Vacuum System - Turbo molecular pump (80L/s) - Two-stage high-performance vacuum pump Sputtering Targets - Standard: Au (60mm × 0.1mm) - Optional: Ag, Pt (customizable) Sputtering Current 0-500A Ultimate Vacuum 5×10⁻⁴ Pa Operating Voltage 220V, 50Hz Key Features & Applications Features: ✔ High Deposition Rate – Enhanced plasma confinement for efficient material utilization. ✔ Low Substrate Heating – Minimized thermal impact on sensitive materials. ✔ Compact Benchtop Design – Ideal for lab-scale thin-film research. ✔ Flexible Target Options – Supports Au, Ag, Pt, and other weakly magnetic materials. Typical Applications: · Semiconductors & Microelectronics – Conductive layers, MEMS, sensors. · Optical Coatings – Reflective/anti-reflective films. · Material Science – Nanostructured thin films, surface engineering. html {margin:0;padding:0;} body {margin:0;padding:5px;} body, td {font:12px/1.5 "sans serif",tahoma,verdana,helvetica;} body, p, div {word-wrap: break-word;} p {margin:5px 0;} table {border-collapse:collapse;} img {border:0;} noscript {display:none;} table.ke-zeroborder td {border:1px dotted #AAA;} img.ke-flash { border:1px solid #AAA; background-image:url(https://www.lithmachine.com/js/htmledit/kindeditor/themes/common/flash.gif); background-position:center center; background-repeat:no-repeat; width:100px; height:100px; } img.ke-rm { border:1px solid #AAA; background-image:url(https://www.lithmachine.com/js/htmledit/kindeditor/themes/common/rm.gif); background-position:center center; background-repeat:no-repeat; width:100px; height:100px; } img.ke-media { border:1px solid #AAA; 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