Versatile Magnetron Sputtering Coater For Conductive Metal Thin Film Layer Deposition

Versatile Magnetron Sputtering Coater For Conductive Metal Thin Film Layer Deposition

 

Model: TMAX-BY-JS06-Benchtop System for R&D and Educational Laboratories

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Overview

The TMAX-BY-JS06 is a compact, cost-effective, high-vacuum magnetron sputtering system designed for pilot-scale experiments in research and educational laboratories. It integrates key components, including a sputtering vacuum chamber, permanent magnet targets (strong/weak magnetic fields), a fiber-optic rotary stage (customizable), DC power supply, gas supply system, pumping system, water cooling system, film thickness monitoring, vacuum measurement, electronic control system, and a sturdy mounting frame.

Key Parameters

Parameter	Specification
Sputtering Gas	Adjustable (e.g., argon, nitrogen, etc., depending on experimental requirements).
Target Material	Standard: Gold target; Optional: Silver, copper, chromium, etc.
Target Configuration	50mm (weak magnetic target) / 60mm (strong magnetic target).
Sputtering Current	0–500mA
Ultimate Vacuum	≤5×10−4 Pa
Chamber Dimensions	Diameter: 180mm; Height: 200mm
Sample Stage	Fiber-optic rotary stage (customizable).
Operating Voltage	230V, 50Hz

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Applications & Features

1. Coating for Electron Beam-Sensitive Samples

· Ideal for: Biological specimens, polymers, and other beam-sensitive materials.

· Advantage: In SEM imaging, high-energy electron beams can cause thermal damage to delicate samples. A thin sputtered conductive coating (e.g., gold or carbon) acts as a protective layer, preserving sample integrity while enhancing imaging quality.

2. Non-Conductive Samples

· Ideal for: Insulating materials (e.g., ceramics, glass, or organic compounds).

· Advantage: Non-conductive samples accumulate surface charges ("charging effect") under electron beams, distorting SEM images. A sputtered conductive metal layer (e.g., gold or platinum) dissipates charges, eliminating artifacts and improving signal-to-noise ratio for clearer imaging.

3. Electrode Fabrication & Conductivity Studies

· Ideal for: Novel materials requiring conductive electrodes for electrical property analysis.

· Advantage: Enables precise deposition of thin conductive films for experimental electrode fabrication, facilitating studies on material conductivity.