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contact us
- If you have questions, please contact us, all questions will be answered
- WhatsApp : +86 18659217588
- Email : David@tmaxcn.com
- Email : Davidtmaxcn@gmail.com
- Add : No. 39, Xinchang Road, Xinyang, Haicang Dist., Xiamen, Fujian, China (Mainland)
Auto Vaccum DC Sputter Coater For Multilayer Thin Film Fabrication
Model Number:
TMAX-BY-JS10Input Power:
2000WCompliance:
CE CertifiedWarranty:
One Year limited warranty with lifetime supportShipping Port:
XiamenMOQ:
1Payment:
L/C D/A D/P T/T Western UnionDelivery Time:
5 days
- WhatsApp : +86 18659217588
- Email : David@tmaxcn.com
- Email : Davidtmaxcn@gmail.com
- Wechat : 18659217588
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Small Multi-target Metal Ion Sputtering Coater MachineNext:
PVD DC Sputtering Coating System For Oxides & Ceramics & Semiconductors
Auto Vaccum DC Sputter Coater For Multilayer Thin Film Fabrication
Model: TMAX-BY-JS10 – Product Specifications
1. Technical Specifications Table
Parameter |
Specification |
Model Number |
TMAX-BY-JS10 |
Vacuum Pump |
Oil-required Rotary Vacuum Pump (Explicit oil filling needed) |
Pumping Speed |
50Hz: 16 m³/h (4.4 L/s) • 60Hz: 19.2 m³/h (5.2 L/s) • 20% speed boost at 60Hz |
Ultimate Vacuum |
2 Pa |
Max Sputtering Current |
1.6A |
Operating Pressure Range |
20 Pa – 8 Pa |
Pump-Down Time |
<5 min (to 2 Pa) |
Vacuum Measurement Range |
Atmospheric pressure to 2×10⁷ mbar |
Gas Control System |
Precision Gas Flow Controller |
Chamber Specifications |
Ø350 × 240mm (H) • Scratch-resistant quartz glass viewport |
Target Specifications |
Ø200mm • Materials: Au, Ag, Pt, Cu (noble/conductive metals) |
Operation |
Instruction manual guided |
Dimensions/Weight |
490(L) × 400(W) × 590(H) mm • 70 kg |
Power Requirements |
Dual-voltage: AC 110V/60Hz (Americas) or AC 220V/50Hz (Europe/Asia) |
Power Consumption |
<1500W |
Warranty & Support |
1-year limited warranty + lifetime technical support |
2. Key Features & Competitive Advantages
Precision-Oriented Design
· Dual-Frequency Pumping: Automatically adapts to 50Hz/60Hz power grids (19.2 m³/h vs 16 m³/h) for global compatibility.
· Scratch-Resistant Quartz Viewport: Ensures long-term visibility during deposition without degradation.
· Oil-Lubricated Vacuum Pump: Delivers stable 2 Pa base pressure (vs. dry pumps), critical for consistent thin-film quality.
Material Versatility
· Broad Target Compatibility: Supports Au/Ag/Pt/Cu targets for conductive/noble metal coatings.
· Rapid Process Setup: <5-minute pump-down enables efficient batch processing.
User-Centric Engineering
· Global Voltage Support: No external converter needed for 110V/220V operation.
· Compact Footprint: Benchtop design (0.49×0.4×0.59m) saves lab space.
+86 13174506016
David@tmaxcn.com
