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Sputter Coater for SEM Sample Preparation

SEM Low-Temperature Mini Magnetron Sputtering System For Au, Ag, Al, Metal

  • Model Number:

    TMAX-BY-JS08
  • Input Power:

    2000W
  • Compliance:

    CE Certified
  • Warranty:

    One Year limited warranty with lifetime support
  • Shipping Port:

    Xiamen
  • MOQ:

    1
  • Payment:

    L/C D/A D/P T/T Western Union
  • Delivery Time:

    5 days
Product Details

SEM Low-Temperature Mini Magnetron Sputtering System For Au, Ag, Al, Metal 

 

 

Glovebox-Compatible SEM Sample Coater for Beam-Sensitive Materials


1. System Overview

✔ Non-conductive sample coating (Au/Ag/Pt) for SEM imaging
✔ Temperature-sensitive substrates (<60°C process temp)

✔ High-quality thin film deposition with minimized thermal damage


2.  Core parameter

Parameter

Specification

Ultimate Vacuum

4×10⁻² mbar

Base Vacuum

1 Pa

Pump Down Time

<1 minute

Vacuum Pump

Rotary Vane (2 L/s, Oil-lubricated)

Vacuum Measurement

Mechanical Gauge (Atmosphere-10⁻² mbar)


3. Cold Sputtering Technology: Patented magnetic confinement reduces substrate heating


4. Glovebox-Adaptable: Optional configuration for inert atmosphere processing

Parameter

Specification

Model

TMAX-BY-JS08

Sputtering Type

DC Magnetron (Physical Vapor Deposition)

Target Materials (Standard)

Au (50mmØ×0.1mm)

Optional Target Materials

Ag, Pt, Cr

Maximum Substrate Size

Ø70mm (customizable)

Chamber Material

Borosilicate Glass (160mmØ×120mmH)

System Dimensions (W×D×H)

300×360×380 mm

Weight

28 kg

Metal Magnetron Sputtering System

Magnetron Sputtering System

Low-Temperature Sputter